Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus

Abstract

and a plasma generating portion including a coil and a power source connected to the coil.

What is claimed is: 
     
         1 . A vapor deposition apparatus depositing a thin film on a substrate, the vapor deposition apparatus comprising:
 a plurality of modules;   a receiving portion disposed opposite to and geometrically corresponding to all of the plurality of modules; and   a stage disposed within the receiving portion, the stage supporting the substrate,   each of the modules comprising:
 a body comprising an upper member and a lateral member coupled to the upper member; 
 a plurality of first injection portions disposed in the lateral member, the plurality of first injection portions injecting at least one gas into a space between the lateral member and the upper member; 
 a second injection portion disposed in the upper member, the second injection portion injecting at least one gas into the space between the lateral member and the upper member; and 
 a plasma generating portion comprising a coil disposed at one surface of the upper member and a power source connected to the coil. 
   
     
     
         2 . The vapor deposition apparatus of  claim 1 , further comprising a driving unit moving the substrate in the receiving portion when the substrate is disposed on the stage. 
     
     
         3 . The vapor deposition apparatus of  claim 2 , wherein the plurality of modules are arranged in parallel in one direction, and the driving unit moves the substrate in a direction parallel to the direction in which the modules are arranged. 
     
     
         4 . The vapor deposition apparatus of  claim 3 , wherein the driving unit moves the substrate backward and forward along the direction in which the modules are arranged. 
     
     
         5 . The vapor deposition apparatus of  claim 1 , wherein the receiving portion comprises an exhaust portion, and the exhaust portion is disposed below the stage. 
     
     
         6 . The vapor deposition apparatus of  claim 1 , wherein each of the modules further comprises slit portions disposed between the corresponding lateral member and the receiving portion, and the slit portions are connected to a DC power source. 
     
     
         7 . The vapor deposition apparatus of  claim 1 , wherein the first injection portions included in each module are disposed at one side of the lateral member and at another side of the lateral member facing the one side of the lateral member. 
     
     
         8 . The vapor deposition apparatus of  claim 1 , wherein each of the modules further comprises an exhaust port disposed in the lateral member, and the exhaust portion is formed to be spaced apart from the corresponding first injection portions. 
     
     
         9 . The vapor deposition apparatus of  claim 8 , wherein each first injection portion comprises one end facing the space between the lateral member and the upper member, and the exhaust port is disposed closer to the upper member in comparison with the one end of the first injection portion. 
     
     
         10 . The vapor deposition apparatus of  claim 1 , wherein each of the modules further comprises a cover formed to cover a surface of the coil, with the surface facing the substrate among surfaces of the coil. 
     
     
         11 . The vapor deposition apparatus of  claim 10 , wherein the cover is formed of an insulating material. 
     
     
         12 . The vapor deposition apparatus of  claim 1 , wherein each of the modules further comprises an insulating member disposed in the lateral member. 
     
     
         13 . The vapor deposition apparatus of  claim 12 , wherein each first injection portion comprises one end facing the space between the lateral member and the upper member, and the insulating member is formed not to overlap with the one end of the first injection portion. 
     
     
         14 . The vapor deposition apparatus of  claim 1 , further comprising a mask comprising an opening for depositing a desired pattern on the substrate. 
     
     
         15 . The vapor deposition apparatus of  claim 1 , wherein the modules are formed to be coupled to or separable from each other, and the upper member and the lateral member of each module are formed to be coupled to or separable from each other.