US2019047116A1PendingUtilityA1

Processing apparatus

Assignee: DISCO CORPPriority: Aug 10, 2017Filed: Aug 2, 2018Published: Feb 14, 2019
Est. expiryAug 10, 2037(~11 yrs left)· nominal 20-yr term from priority
Inventors:Masaki Kakefuda
H10P 72/0428H10P 72/0406H10P 72/06B24B 55/06B24B 49/12B24B 7/07B24B 41/068B24B 37/345B24B 41/005B24B 37/10B24B 41/02B24B 27/0069
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Claims

Abstract

A processing apparatus includes a chuck table configured to hold a plate-shaped workpiece thereon, a processing unit including a spindle having an end portion at which a processing tool for grinding or polishing a workpiece held on the chuck table is to be mounted, a processing room surrounded by a wall and configured to accommodate the chuck table and the end portion of the spindle therein, and a dirty situation indication unit configured to indicate a degree of adhesion of processing waste, which is generated by grinding or polishing of the workpiece, to the wall. The dirty situation indication unit includes a transmission window made of a member that passes visible rays therethrough and configuring part of the wall, and a color sample indication unit indicative of a relationship between an amount of the processing waste adhering on the transmission window and a color of the transmission window.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A processing apparatus, comprising:
 a chuck table configured to hold a plate-shaped workpiece thereon;   a processing unit including a spindle having an end portion at which a processing tool for grinding or polishing the workpiece held on the chuck table is to be mounted;   a processing room surrounded by a wall and configured to accommodate the chuck table and the end portion of the spindle therein; and   a dirty situation indication unit configured to indicate a degree of adhesion of processing waste, which is generated by grinding or polishing of the workpiece, to the wall, wherein   the dirty situation indication unit includes
 a transmission window made of a member that passes visible rays therethrough and configuring part of the wall, and 
 a color sample indication unit provided in an overlapping relationship with the transmission window or adjacent the transmission window and indicative of a relationship between an amount of the processing waste adhering on the transmission window and a color of the transmission window.

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