Resonator device, oscillator, electronic apparatus, and vehicle

Abstract

A resonator device includes a substrate, a resonator element including a base member having first and second surface, and a pair of excitation electrodes, and first and second bonding member. Defining center of the first and second bonding member as a first and second bonding center, a center of a resonating region as a resonating region center, and defining a distance between the first bonding center and the second bonding center as L1, a length of a perpendicular drawn from the resonating region center to an imaginary line connecting the first bonding center and the second bonding center to each other as L2, a linear expansion coefficient of the first metal layer, the second metal layer, and the base member as α1, α2, α3 respectively, and a length of the resonator element as L3, 0<L1/L2≤0.97, |(α2−α1)/α1|≤0.35, |(α3−α1)/α1|≤0.35, and L3≤1.5 mm are satisfied.

What is claimed is: 
     
         1 . A resonator device comprising:
 a substrate;   a resonator element including;
 a base member having a first surface and a second surface opposite to each other, the base member having a first side that extends in a first direction in a plan view; 
 a first excitation electrode that is disposed on the first surface of the base member; 
 a second excitation electrode that is disposed on the second surface of the base member; 
 a first connection electrode that is electrically connected to the first excitation electrode, the first connection electrode being disposed on the second surface of the base member; and 
 a second connection electrode that is electrically connected to the second excitation electrode, the second connection electrode being disposed on the second surface of the base member, 
 wherein the first and second connection electrodes are arranged along the first side of the base member in the first direction, each of the first and second excitation electrodes is configured by a stacked metal layer having first and second meal layers stacked to each other, and the first metal layer is located closer to the base member than the second metal layer; and 
   a first bonding member and a second bonding member that bond the substrate and the resonator element to each other, the first and second bonding members overlapping the first and second connection electrodes in the plan view, respectively,   wherein the first bonding member has a first bonding center at a side of the resonator element in the plan view, the second bonding member has a second bonding center at a side of the resonator element in the plan view, a resonating region center of a resonating region of the resonator element sandwiched by the first and second excitation electrodes in the plan view, and   when a distance between the first bonding center and the second bonding center is L1, a length of a perpendicular drawn from the resonating region center to an imaginary line connecting the first bonding center and the second bonding center is L2, a linear expansion coefficient of the first metal layer is α1, a linear expansion coefficient of the second metal layer is α2, a linear expansion coefficient of the base member is α3, and a dimension in the first direction of the resonator element is L3,   0<L1/L2≤0.97, |(α2−α1)/α1|≤0.35, |(α3−α1)/α1|≤0.35, and L3≤1.5 mm.   
     
     
         2 . The resonator device according to  claim 1 ,
 wherein 0<L1/L2≤0.85.   
     
     
         3 . The resonator device according to  claim 1 ,
 wherein when a distance between the first and second surfaces of the base member is a thickness, the resonator element includes a first region having a first thickness and a second region having a thickness thinner than the first thickness, and   the resonating region center overlaps the first region in the plan view, and the first bonding center and the second bonding center overlap the second region in the plan view.   
     
     
         4 . The resonator device according to  claim 1 ,
 wherein a dimension of the resonator element in a second direction perpendicular to the first direction is L4, and L4≤1.8 mm.   
     
     
         5 . The resonator device according to  claim 1 ,
 wherein the base member is made of a quartz crystal,   the first metal layer is made of one of nickel (Ni) and an alloy including nickel (Ni) as a principal component, and   the second metal layer is made of one of gold (Au) and an alloy including gold (Au) as a principal component.   
     
     
         6 . The resonator device according to  claim 1 , further comprising:
 a lid,   wherein the resonator element and the first and second bonding members are encapsulated by the lid and the substrate.   
     
     
         7 . An oscillator comprising:
 the resonator device according to  claim 1 ;   a circuit element having an oscillation circuit that is configured to oscillate the resonator device; and   a container that houses the resonator device and the circuit element.   
     
     
         8 . An oscillator comprising:
 the resonator device according to  claim 3 ;   a circuit element having an oscillation circuit that is configured to oscillate the resonator device; and   a container that houses the resonator device and the circuit element.   
     
     
         9 . The oscillator according to  claim 7 , further comprising:
 a first lid, the resonator element and the first and second bonding members being encapsulated by the first lid and the substrate; and   a second lid, the resonator device and the circuit element being encapsulated by the second lid and the container,   wherein the circuit element is connected to an outer surface of the first lid via a connection member.   
     
     
         10 . The oscillator according to  claim 8 , further comprising:
 a first lid, the resonator element and the first and second bonding members being encapsulated by the first lid and the substrate; and   a second lid, the resonator device and the circuit element being encapsulated by the second lid and the container,   wherein the circuit element is connected to an outer surface of the first lid via a connection member.   
     
     
         11 . An electronic apparatus comprising:
 the resonator device according to  claim 1 ; and   a display.   
     
     
         12 . An electronic apparatus comprising:
 the resonator device according to  claim 3 ; and   a display.   
     
     
         13 . A movable object comprising:
 the resonator device according to  claim 1 ;   an electric control unit in which the resonator device is assembled; and   a movable body that houses the electric control unit.   
     
     
         14 . A movable object comprising:
 the resonator device according to  claim 3 ;   an electric control unit in which the resonator device is assembled; and   a movable body that houses the electric control unit.