Motion sensor integrated nano-probe n/mems apparatus, method, and applications

Abstract

A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

What is claimed is: 
     
         1 . A nano-probe N/MEMS apparatus, comprising:
 an operationally stationary substrate having a top support surface;   a nano-probe device structure having a bottom surface disposed adjacently over an area of the top support surface of the substrate;   a pedestal structure disposed adjacent said top support surface of the substrate and said bottom surface of the nano-probe device structure, the pedestal structure fixedly connecting the nano-probe device structure to the substrate;   at least one sensor coupled to the nano-probe device structure and fixedly connected to said top support surface via a portion of the pedestal structure;   a nano-probe having a distal tip operatively not attached to the nano-probe device structure and the at least one sensor, wherein the nano-probe is freely moveable with respect to both the nano-probe device structure and the stationary substrate at least in a plane parallel to the top support surface of the substrate and parallel to the bottom surface of the nano-probe device structure.   
     
     
         2 . The nano-probe apparatus of  claim 1 , wherein the at least one sensor is configured to measure displacement of the nano-probe. 
     
     
         3 . The nano-probe apparatus of  claim 1 , wherein the sensor comprises a capacitive sensor. 
     
     
         4 . The nano-probe apparatus of  claim 3 , wherein the capacitive sensor comprises a comb portion. 
     
     
         5 . The nano-probe apparatus of  claim 4 , wherein the comb portion is configured to measure the movement or displacement of the nano-probe. 
     
     
         6 . The nano-probe apparatus of  claim 1 , wherein the nano-probe is coupled to at least one actuator. 
     
     
         7 . The nano-probe apparatus of  claim 1 , wherein the nano-probe tip is moveable in an elliptical 3D orbit. 
     
     
         8 . The nano-probe apparatus of  claim 1 , wherein the nano-probe device structure further comprises a spring coupled to the nano-probe. 
     
     
         9 . The nano-probe apparatus of  claim 8 , wherein the spring is a meander spring. 
     
     
         10 . The nano-probe apparatus of  claim 8 , wherein the nano-probe device structure further comprises a pair of symmetrically located springs coupled to the nano-probe. 
     
     
         11 . The nano-probe apparatus of  claim 1 , wherein the nano-probe device structure comprises at least one immovable probe tip disposed operationally adjacent the nano-probe tip. 
     
     
         12 . The nano-probe apparatus of  claim 11 , wherein the nano-probe tip is electrically isolated from the at least one immovable probe tip. 
     
     
         13 . The nano-probe apparatus of  claim 11 , wherein the nano-probe tip is retractable, extendable, and bendable with respect to the at least one immovable probe tip. 
     
     
         14 . The nano-probe apparatus of  claim 11 , wherein the nano-probe tip and the at least one immovable probe tip are separated by an air gap. 
     
     
         15 . The nano-probe apparatus of  claim 1 , wherein the at least one sensor comprises a junction field-effect device and a spring. 
     
     
         16 . The nano-probe apparatus of  claim 15 , wherein the sensor comprises a junction field-effect device channel region. 
     
     
         17 . The nano-probe apparatus of  claim 15 , wherein the junction field-effect device is coupled to the nano-probe through at least one actuator. 
     
     
         18 . The nano-probe apparatus of  claim 15 , wherein the junction field-effect device is a JFET that is monolithically integrated into the nano-probe N/MEMS apparatus. 
     
     
         19 . The nano-probe apparatus of  claim 18 , wherein the nano-probe is coupled to a JFET electrode through an electrostatic energy-sustaining gap. 
     
     
         20 . The nano-probe apparatus of  claim 15 , wherein the at least one sensor comprises a piezo-transducer. 
     
     
         21 . A probing method, comprising:
 positioning, with respect to a sample, a nano-probe N/MEMS apparatus comprising:
 an operationally stationary substrate having a top support surface; 
 a nano-probe device structure having a bottom surface disposed adjacently over an area of the top support surface of the substrate; 
 a pedestal structure disposed adjacent said top support surface of the substrate and said bottom surface of the nano-probe device structure, the pedestal structure fixedly connecting the nano-probe device structure to the substrate; 
 at least one sensor coupled to the nano-probe device structure and fixedly connected to said top support surface via a portion of the pedestal structure; and 
 a nano-probe having a distal tip operatively not attached to the nano-probe device structure and the at least one sensor, wherein the nano-probe is freely moveable with respect to both the fixedly disposed nano-probe device structure and the stationary substrate at least in a plane parallel to the flat, top support surface of the substrate and parallel to the bottom surface of the nano-probe device structure; and 
   moving the nano-probe with respect to the sample while measuring a signal output from the at least one sensor.   
     
     
         22 . The method of  claim 21 , wherein the nano-probe is coupled to the at least one sensor through an electrostatic energy-sustaining gap. 
     
     
         23 . The method of  claim 21 , wherein the at least one sensor comprises a JFET, further wherein the nano-probe is coupled to a JFET electrode through an electrostatic energy-sustaining gap, and further wherein the freely moveable nano-probe is configured to be sensed by a change in a JFET channel carrier mobility via an electrostatic force-induced strain in the JFET channel. 
     
     
         24 . The method of  claim 21 , wherein the at least one sensor comprises a JFET, further wherein the nano-probe is coupled to a JFET electrode through an electrostatic energy-sustaining gap, and further wherein the freely moveable nano-probe is configured to be sensed by a floating potential on a JFET gate generated by a coupled charge across the nano-probe, which modulates a JFET channel current in the form of a measureable signal. 
     
     
         25 . The method of  claim 21 , wherein the at least one sensor comprises a capacitive sensor, further wherein the nano-probe is coupled to the capacitive sensor through energy sustaining gap.