Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner

Abstract

Disclosed is an optical module for a lens, especially a microlithographic apparatus, comprising a first holding device (2) with an inner circumference (2.1) that extends in a first circumferential direction (2.2), and at least one first supporting device (3.1) which is fastened to the inner circumference (2.1) of said first holding device (2) and is used for supporting a first optical element (5.1), an annular circumferential first assembly space (3.18) being defined by displacing the first supporting device (3.1) once in a revolving manner along the first circumferential direction (2.2). At least one second supporting device (3.2) which is fixed to the inner circumference (2.1) of the first holding device (2) is provided for supporting a second optical element (5.2), an annular circumferential second assembly space (3.28) being defined by displacing the second supporting device (3.2) once in a revolving manner along the first circumferential direction (2.2). The first assembly space (3.18) intersects the second assembly space (3.28).

2 .- 23 . (canceled) 
     
     
         24 . An optical module comprising:
 a first holding device with a circumference extending in a first circumferential direction; and   a plurality of first supporting devices configured to support a first optical element, the first supporting devices being fixed at the circumference of the first holding device,   wherein:
 along the first circumferential direction, at least one of the first supporting devices is located in a non-equidistant manner between two neighboring first supporting devices; 
 the first optical element has a shape selected from a group consisting of a shape that is asymmetric along the circumferential direction, a shape that is non-rotationally symmetric along the circumferential direction, a shape that has a recess forming a light passage, and a shape that has a recess causing an asymmetry of the first optical element; and 
 the optical module is configured to be used in a microlithography objective. 
   
     
     
         25 . The optical module of  claim 24 , wherein each first supporting device is a bipod with a first leg and a second leg. 
     
     
         26 . The optical module of  claim 24 , further comprising a plurality of second supporting devices,
 wherein:
 the second supporting devices are configured to support a second optical element; 
 the second supporting devices are fixed at a circumference of the first holding device; the first supporting devices do not contact the second supporting devices; and 
 the first optical element is separate from the second optical element, or the first optical element is non-contiguous with the second optical element. 
   
     
     
         27 . The optical module of  claim 26 , wherein, along the first circumferential direction, one of the first supporting devices is located in a non-equidistant manner between two neighboring second supporting devices. 
     
     
         28 . The optical module of  claim 26 , wherein:
 a first assembly space is defined by a first shell formed if the first supporting devices were displaced through 360° about a central axis and along the first circumferential direction;   a second assembly space is defined by a second shell formed if the second supporting devices were displaced through 360° along the first circumferential direction; and   the outer surface of the first shell intersects the outer surface of the second shell so that the first assembly space intersects the second assembly space or penetrates the second assembly space.   
     
     
         29 . The optical module of  claim 28 , further comprising at least one third supporting device configured to support a third optical element, wherein the at least one third supporting device is fixed at a circumference of the first holding device, a third assembly space is defined by a third shell formed if the at least one third supporting device were displaced through 360° along the first circumferential direction, and the third assembly space intersects at least one of the first assembly space and the second assembly space. 
     
     
         30 . The optical module of  claim 28 , wherein:
 the first shell has an outer surface having a first end located at the circumference of the first holding device at a first level along the central axis and a second end located adjacent the first optical element at a second level along the central axis;   the second end of the first shell is opposite the first end of the first shell;   the second level is spaced from the first level along the central axis;   the second shell has an outer surface having a first end located at the circumference of the first holding device and a second end adjacent the second optical element; and   the second end of the second shell is opposite the first end of the second shell.   
     
     
         31 . The optical module of  claim 28 , wherein the first shell is in the shape of a truncated cone, and the second shell is in the shape of a truncated cone. 
     
     
         32 . The optical module of  claim 28 , wherein the first shell is in the shape of a cylinder, and the second shell is in the shape of a cylinder. 
     
     
         33 . The optical module of  claim 28 , wherein the first shell is in the shape of a toroidal body, and the second shell is in the shape of a toroidal body. 
     
     
         34 . The optical module of  claim 26 , wherein the first circumferential direction lies in a first plane and at least one of the following holds:
 at least one device selected from the group consisting of the plurality of first supporting devices and the plurality of second supporting devices extends at least in a first direction which runs perpendicular to the first circumferential direction in the first plane; and   at least one device selected from the group consisting of the plurality of first supporting devices and at least one of the plurality of second supporting devices extends at least in a second direction which runs perpendicular to the first plane.   
     
     
         35 . The optical module of  claim 26 , wherein at least one supporting device is fixed detachably to the first holding device, the at least one supporting device being selected from the group consisting of one of the first supporting devices, one of the second supporting devices, and a combination thereof. 
     
     
         36 . The optical module of  claim 35 , wherein the at least one supporting device includes at least one connection element for the connection of the at least one supporting device to the first holding device. 
     
     
         37 . The optical module of  claim 26 , wherein:
 at least one of the first supporting devices is connected to a first contact element of the first holding device,   at least one of the second supporting devices is connected to a second contact element of the first holding device,   the first contact element and the second contact element being arranged substantially in a common second plane, which runs parallel to a first plane in which the first circumferential direction lies.   
     
     
         38 . The optical module of  claim 26 , wherein:
 at least one supporting device is fixed to the first holding device so as to be adjustable; and   the at least one supporting device is selected from the group consisting of the first supporting devices, the second supporting devices, and a combination thereof.   
     
     
         39 . The optical module of  claim 26 , wherein:
 at least one supporting device is configured to adjust the position of the optical element supported by the at least one supporting device; and   the at least one supporting device is selected from the group consisting of the first supporting devices, the second supporting devices, and a combination thereof.   
     
     
         40 . The optical module of  claim 26 , wherein, for at least one optical element, a plurality of supporting devices are fixed to the holding device and are configured to statically support the at least one optical element. 
     
     
         41 . The optical module of  claim 26 , wherein at least one second supporting device is a bipod comprising first and second legs. 
     
     
         42 . The optical module of  claim 26 , further comprising a mounting device for at least one optical element selected from the group consisting of the first optical element and the second optical element, wherein the mounting device is connected detachably to an end of at least one supporting device for the at least one optical element facing away from the first holding device, and the at least one supporting device is selected from the group consisting of the first supporting devices, the second supporting devices, and a combination thereof. 
     
     
         43 . The optical module of  claim 26 , wherein:
 at least one optical element is supported by at least one supporting device on the holding device;   the at least one supporting device is selected from the group consisting of one of the first supporting devices, one of the second supporting devices, and a combination thereof; and   the at least one optical element is selected from the group consisting of the first optical element and the second optical element.   
     
     
         44 . The optical module of  claim 43 , wherein the at least one optical element is connected directly to an end of the at least one supporting device for the at least one optical element facing away from the first holding device. 
     
     
         45 . The optical module of  claim 43 , wherein the at least one optical element comprises a reflecting element. 
     
     
         46 . The optical module of  claim 43 , wherein the at least one optical element has a projection which is connected to an end of the at least one supporting device for the at least one optical element facing away from the first holding device. 
     
     
         47 . The optical module of  claim 26 , wherein the first optical element is reflective, and the second optical element is reflective. 
     
     
         48 . The optical module of  claim 47 , wherein:
 the first optical element comprises a reflecting face;   the second optical element comprises a reflecting face,   the first optical element and second optical elements are arranged directly adjacent to one another; and   the reflecting of the first optical element faces the reflecting face of the second optical element.   
     
     
         49 . The optical module of  claim 47 , wherein the first optical element comprises an optical surface configured to reflect light directly onto an optical surface of the second optical element. 
     
     
         50 . The optical module of  claim 24 , wherein the first optical element is reflective. 
     
     
         51 . The optical module of  claim 26 , wherein:
 the optical module has a total number S of supporting devices fixed at the circumference of the first holding device;   the total number S of the supporting devices includes the first supporting devices and the second supporting devices;   one of the total number S of supporting devices is displaced with respect to a neighboring one of the total number S of supporting devices by an angle which is not equal to   
       
         
           
             
               α 
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                   360 
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                 S 
               
             
           
         
       
       with respect to a central axis of the first holding device in the first circumferential direction;
 the central axis runs perpendicular to a first plane in which the first circumferential direction lies. 
 
     
     
         52 . The optical module of  claim 24 , wherein the optical module comprises precisely three of the first supporting devices. 
     
     
         53 . The optical module of  claim 26 , wherein the second optical element has a shape selected from a group consisting of a shape that is asymmetric along the circumferential direction, a shape that is non-rotationally symmetric along the circumferential direction, a shape that has a recess forming a light passage, and a shape that has recess causing an asymmetry of the further optical element. 
     
     
         54 . The optical module of  claim 26 , wherein the optical module comprises precisely three of the first supporting devices. 
     
     
         55 . An optical module comprising:
 a holding device with a circumference extending in a circumferential direction; and   a plurality of supporting devices configured to support an optical element;   wherein:
 each of the supporting devices is configured to support the optical element at a first support location; 
 each of the supporting devices is fixed to the holding device at a second support location which is different from the first support location; 
 along the circumferential direction, at least one of the first support locations is located in a non-equidistant manner between two neighboring first support locations; 
 the optical element has a shape selected from a group consisting of a shape that is asymmetric along the circumferential direction, a shape that is non-rotationally symmetric along the circumferential direction, a shape that has a recess forming a light passage, and a shape that has recess causing an asymmetry of the optical element; and 
 the optical module is configured to be used in a microlithography objective.