US2018354859A1PendingUtilityA1
Structure
Est. expiryNov 10, 2036(~10.3 yrs left)· nominal 20-yr term from priority
C04B 2235/9669C04B 2235/781C04B 35/553C04B 35/62222C04B 2235/3225C04B 2235/76H01J 37/32495C04B 2235/445C04B 35/5156C04B 35/62218
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Claims
Abstract
According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity of rhombohedron detected near diffraction angle 2θ=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2θ=36.1° as r2, and taking a proportion γ1 as γ1(%)=r2/r1×100, the proportion γ1 is not less than 0% and less than 100%.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A structure including a polycrystalline substance of yttrium oxyfluoride as a main component, the yttrium oxyfluoride having a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance being less than 100 nanometers,
when taking a peak intensity of rhombohedron detected near diffraction angle 2θ=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2θ=36.1° as r2, and taking a proportion γ1 as γ1(%)=r2/r1×100, the proportion γ1 being not less than 0% and less than 100%.Join the waitlist — get patent alerts
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