Method for depositing a coating

Abstract

The present invention relates to a method of depositing a coating comprising zinc oxide on a substrate; to a chemical vapour deposition precursor mixture for use in same and to a coated glass article and a photovoltaic cell prepared with a zinc oxide coating prepared using the method which comprises: providing a substrate, providing a precursor mixture comprising an alkyl zinc compound and a phosphorus source, the phosphorus source comprising a compound of formula O n P(OR) 3 , wherein n is 0 or 1 and each R is hydrocarbyl, and delivering the precursor mixture to a surface of the substrate.

1 .- 21 . (canceled) 
     
     
         22 . A method of depositing a coating comprising zinc oxide on a substrate, the method comprising,
 providing a substrate,   providing a precursor mixture comprising an alkyl zinc compound and a phosphorus source, the phosphorus source comprising a compound of formula O n P(OR 3 ) 3 , wherein n is 0 or 1 and each R 3  is hydrocarbyl, and   delivering the precursor mixture to a surface of the substrate.   
     
     
         23 . The method according to  claim 22 , wherein the precursor mixture further comprises an oxygen source. 
     
     
         24 . The method according to  claim 22 , wherein the alkyl zinc compound is of formula R 1 R 2 Zn, wherein R 1  and R 2  are each independently selected from a substituted or unsubstituted C 1 -C 4  alkyl or phenyl. 
     
     
         25 . The method according to  claim 24 , wherein R 1  and R 2  are each independently selected from methyl or ethyl. 
     
     
         26 . The method according to  claim 25 , wherein R 1  and R 2  are each methyl or each ethyl. 
     
     
         27 . The method according to  claim 22 , wherein each R 3  is independently selected from a substituted or unsubstituted C 1 -C 4  alkyl. 
     
     
         28 . The method according to  claim 27 , wherein each R 3  is propyl, ethyl or methyl. 
     
     
         29 . The method according to  claim 23 , wherein the oxygen source comprises an ester. 
     
     
         30 . The method according to  claim 29 , wherein the ester is selected from one or more of methyl acetate, ethyl acetate, propyl acetate, butyl acetate, or a mixture of two or more of these esters. 
     
     
         31 . The method according to  claim 30 , wherein the ester comprises t-butyl acetate. 
     
     
         32 . The method according to  claim 22 , wherein the precursor mixture is a gaseous precursor mixture. 
     
     
         33 . The method according to  claim 22 , wherein the method is atmospheric pressure chemical vapour deposition. 
     
     
         34 . The method according to  claim 22 , wherein the substrate comprises glass. 
     
     
         35 . The method according to  claim 34 , wherein the substrate comprises float glass. 
     
     
         36 . The method according to  claim 22 , wherein the surface of the substrate is at a temperature in the range 300° C. to 800° C. 
     
     
         37 . The method according to  claim 36 , wherein the surface of the substrate is at a temperature in the range 580° C. to 650° C. 
     
     
         38 . The method according to 22, wherein the coating comprising zinc oxide is deposited on-line during the float glass production process. 
     
     
         39 . A chemical vapour deposition precursor mixture for use in the method of  claim 22 , comprising an alkyl zinc compound, a phosphorus source and, optionally, an ester, the phosphorus source comprising a compound of formula O n P(OR 3 ) 3 , wherein n is 0 or 1 and each R 3  is hydrocarbyl, the chemical vapour deposition precursor mixture. 
     
     
         40 . A coated glass article, comprising:
 a glass substrate;   a silica or tin oxide coating deposited on the glass substrate;   a zinc oxide coating;   wherein the zinc oxide coating is deposited over the silica or tin oxide coating by a method according to  claim 22 .   
     
     
         41 . A photovoltaic cell comprising a coated glass article having a zinc oxide coating deposited over a fluorine doped tin oxide coating by a method according to any one of  claim 22 .