Closure or lock device for a vacuum chamber

Abstract

Closure device or lock device for a vacuum chamber comprising a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber, a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate, at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.

1 . Closure device or lock device for a vacuum chamber, comprising
 a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber,   a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate;   at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.   
     
     
         2 . Closure or lock device according to  claim 1 , wherein the closure cover has a level top surface and wherein the closure cover can be slid in a direction parallel to a surface normal of the top surface on the frame. 
     
     
         3 . Closure or lock device  claim 1 , wherein the closure cover is connected to the frame via at least one restoring element and wherein the restoring element is configured to exert a restoring force directed against the closing force onto the closure cover. 
     
     
         4 . Closure or lock device according to any one of the preceding  claim 1 , wherein the at least one restoring element has at least one restoring spring. 
     
     
         5 . Closure or lock device according to  claim 1 , wherein the closure cover is arranged via a plurality of restoring elements on the frame which are spaced apart from each other and wherein a sum of all the restoring forces from all of the restoring elements acting on the closure cover is greater than the weight force of the closure cover. 
     
     
         6 . Closure or lock device according to  claim 1 , wherein the frame is arranged between an open position and a contact position on the counter plate or on the vacuum chamber in a swivelling or slidable manner,
 wherein in the open position, the frame and the closure cover arranged on it release the opening and   wherein the frame abuts the counter plate or the vacuum chamber and the closure cover substantially covers the entire opening in the contact position.   
     
     
         7 . Closure lock device according to  claim 6 , wherein the closure cover, where the frame in the contact position can be transferred from a rest position into the sealing closed position relative to the frame by means of the magnet device. 
     
     
         8 . Closure or lock device according to  claim 1 , wherein, in the contact position of the frame, at the sides of the frame and the counter plate facing each other, at least one spacer is arranged, the extension of which, perpendicular to the level of the frame or perpendicular to the level of the counter plate, is at least just as large as the sum of an adjustment range of the closure cover between the rest position and the closed position on the frame plus the thickness of the closure cover. 
     
     
         9 . Closure or lock device according to  claim 1 , wherein the magnet device has at least one electromagnetic actuator arranged on one of the closure cover and counter plate and at least one counterpart arranged on the other closure cover and counter plate, which magnetically interacts with the electromagnetic actuator. 
     
     
         10 . Closure or lock device according to  claim 1 , wherein an elastically compressible seal is arranged on the closure cover or on the counter plate in an intermediate space between the sides of the closure cover and the counter plate facing each other in a closed position of the closure cover, which surrounds the opening. 
     
     
         11 . Closure or lock device according to  claim 1 , furthermore with:
 at least one distance measuring device to measure a distance between the closure cover and the counter plate,   wherein the magnet device can be regulated depending on the distance measured by the distance measuring device between the counter plate and the closure cover.   
     
     
         12 . Closure or lock device according to  claim 11 , furthermore with at least one electronic control circuit, which is coupled with the distance measuring device and with the magnet device and is configured to do at least one of maintaining and setting a predetermined distance between the counter plate and the closure cover. 
     
     
         13 . Closure or lock device according to  claim 1 , wherein a plurality of magnet devices are arranged in a distributed manner, each provided with its own distance measuring device in across the extent of the opening. 
     
     
         14 . Closure or lock device according to  claim 1 , wherein the closure cover can be mounted to a guide in a non-contact manner by means of one or a plurality of magnetic bearings. 
     
     
         15 . Closure or lock device according to  claim 2 , wherein the closure cover is connected to the frame via at least one restoring element and wherein the restoring element is configured to exert a restoring force directed against the closing force onto the closure cover. 
     
     
         16 . Closure or lock device according to  claim 2 , wherein the at least one restoring element has at least one restoring spring. 
     
     
         17 . Closure or lock device according to  claim 3 , wherein the at least one restoring element has at least one restoring spring. 
     
     
         18 . Closure or lock device according to  claim 2 , wherein the closure cover is arranged via a plurality of restoring elements on the frame which are spaced apart from each other and wherein a sum of all the restoring forces from all of the restoring elements acting on the closure cover is greater than the weight force of the closure cover. 
     
     
         19 . Closure or lock device according to  claim 3 , wherein the closure cover is arranged via a plurality of restoring elements on the frame which are spaced apart from each other and wherein a sum of all the restoring forces from all of the restoring elements acting on the closure cover is greater than the weight force of the closure cover. 
     
     
         20 . Closure or lock device according to  claim 2 , wherein the frame is arranged between an open position and a contact position on the counter plate or on the vacuum chamber in a swivelling or slidable manner,
 wherein in the open position, the frame and the closure cover arranged on it release the opening; and   wherein the frame abuts the counter plate or the vacuum chamber and the closure cover substantially covers the entire opening in the contact position.