US2018308831A1PendingUtilityA1
Semiconductor device and method of manufacturing semiconductor device
Est. expiryMar 14, 2036(~9.6 yrs left)· nominal 20-yr term from priority
H10W 90/732H10W 72/07332H10W 72/07331H10W 72/07311H10W 72/01361H10W 72/951H10W 72/353H10W 72/351H10W 72/073H10W 72/0198H10W 90/00H01L 2924/10253H01L 24/32H01L 2224/29186H01L 2224/27502H01L 2224/83896H01L 24/94H01L 2224/83359H01L 2224/83203H01L 2924/1032H01L 24/96H01L 2224/83009H01L 2224/32145H01L 24/83H01L 25/167H01L 2224/83379H10D 88/00
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Claims
Abstract
According to one embodiment, at first, a compound semiconductor layer is bonded to a position straddling a plurality of chip formation regions arranged on a substrate. One of the chip formation regions has a first size, and the compound semiconductor layer has a second size smaller than the first size. Thereafter, the compound semiconductor layer is processed to provide compound semiconductor elements on the chip formation regions. Then, the substrate is divided to correspond to the chip formation regions.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A semiconductor device comprising:
a substrate; a first structure arranged on the substrate, the first structure including a function block that includes an element pattern and has a predetermined function; and a compound semiconductor element directly bonded to the first structure, wherein no other function block is arranged outside an arrangement position of the compound semiconductor element, when a center side of the substrate is an inside and a periphery thereof is an outside.
2 . The semiconductor device according to claim 1 , wherein
the substrate has a rectangular shape, and the compound semiconductor element is arranged at a position most distant from a center of the substrate.
3 . The semiconductor device according to claim 1 , wherein a plurality of compound semiconductor elements are arranged at the first structure.
4 . The semiconductor device according to claim 1 , wherein
the first structure includes at least one of a reception light/electric signal conversion circuit and an electric signal/transmission light conversion circuit as the function block, and the compound semiconductor element includes at least one of a light receiving element and a light emitting element, the light receiving element being bonded to the reception light/electric signal conversion circuit in the case where the first structure includes the reception light/electric signal conversion circuit, the light emitting element being bonded to the electric signal/transmission light conversion circuit in the case where the first structure includes the electric signal/transmission light conversion circuit.
5 . The semiconductor device according to claim 1 , wherein the substrate is formed of a silicon substrate.
6 . The semiconductor device according to claim 1 , further comprising a second structure that is arranged on the first structure provided with the compound semiconductor element.
7 . The semiconductor device according to claim 6 , wherein
the second structure is a wiring structure that connects the compound semiconductor element to another device element built in the first structure.
8 . The semiconductor device according to claim 1 , wherein the compound semiconductor element is bonded onto the first structure by means of oxide film bonding or adhesive bonding.
9 . The semiconductor device according to claim 1 , wherein
the substrate has a rectangular shape, and the compound semiconductor element is arranged at a first corner of the substrate.
10 . The semiconductor device according to claim 9 , wherein
the first structure includes a processor as the function block, and the processor is arranged at a position distant from the first corner.
11 . The semiconductor device according to claim 10 , wherein the other function block is arranged between the compound semiconductor element and the processor.
12 . The semiconductor device according to claim 3 , wherein
the substrate has a rectangular shape, and the compound semiconductor elements are arranged at a first corner and a second corner of the substrate.
13 . The semiconductor device according to claim 12 , wherein the second corner exists at a diagonal of the first corner.
14 . The semiconductor device according to claim 3 , wherein
the substrate has a rectangular shape, and the compound semiconductor elements are arranged at a first corner, a second corner and a third corner of the substrate.
15 . The semiconductor device according to claim 3 , wherein
the substrate has a rectangular shape, and the compound semiconductor elements are arranged at four corners of the substrate.
16 . The semiconductor device according to claim 1 , wherein
the substrate has a rectangular shape, and the compound semiconductor element is arranged at a peripheral position of the substrate other than the corners.
17 . The semiconductor device according to claim 16 , wherein the compound semiconductor element is arranged along a first side of the substrate.
18 . The semiconductor device according to claim 17 , wherein another function block is not arranged between the compound semiconductor element and the first side.
19 . The semiconductor device according to claim 17 , wherein
the first structure includes a processor as the function block, and the processor is arranged along a second side opposed to the first side.
20 . The semiconductor device according to claim 19 , wherein the other function block is arranged between the compound semiconductor element and the processor.Join the waitlist — get patent alerts
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