Device for manufacturing oriented carbon nanotube aggregates

Abstract

An apparatus for producing an aligned carbon nanotube includes: at least one injection section including at least one injection hole from which a raw material gas is injected to a base substrate; an exhaust vent for exhausting the raw material gas; and an exhaust section including a plurality of exhaust vents, the plurality of exhaust vents being provided so as to be closer to the exhaust vent than a plurality of injection holes included in the at least one injection hole of the at least one injection section.

1 . An apparatus for producing an aligned carbon nanotube aggregate by synthesizing the aligned carbon nanotube aggregate on a base substrate that supports a catalyst on a surface thereof, the apparatus comprising:
 a growth unit for synthesizing the aligned carbon nanotube aggregate on the base substrate by supplying a raw material gas for carbon nanotubes to the catalyst and heating at least either the catalyst or the raw material gas,   the growth unit including:
 at least one injection section including at least one injection hole from which the raw material gas is injected to the base substrate; 
 a first exhaust vent being on one side, relative to the at least one injection section, while a mounting surface on which the base substrate is placed is on the other side relative to the injection section, for exhausting, out of a growth furnace, the raw material gas that was injected from the at least one injection hole and then contacted the base substrate, the growth furnace storing the base substrate while the aligned carbon nanotube aggregate is being synthesized; and 
 an exhaust section including a plurality of second exhaust vents that exhausts, towards the first exhaust vent, the raw material gas that contacted the base substrate, 
 the plurality of second exhaust vents being provided so as to be closer to the first exhaust vent than a plurality of injection holes included in the at least one injection hole of the at least one injection section. 
   
     
     
         2 . The apparatus as set forth in  claim 1 , wherein the exhaust section has a surface which faces the mounting surface and on which the plurality of second exhaust vents are provided. 
     
     
         3 . The apparatus as set forth in  claim 1 , wherein the at least one injection section has at least one injection hole row in which the plurality of injection holes are aligned. 
     
     
         4 . The apparatus as set forth in  claim 3 , wherein the at least one injection hole row includes a plurality of injection hole rows between adjacent ones of which a gap is formed. 
     
     
         5 . The apparatus as set forth in  claim 3 , wherein at least one of exhaust vent rows in which the plurality of second exhaust vents are aligned is located between adjacent ones of the injection hole rows. 
     
     
         6 . The apparatus as set forth in  claim 3 , wherein the at least one injection section includes a plurality of injection hole rows included in the at least one injection hole row in which the plurality of injection holes are aligned, the plurality of injection hole rows constituting a comb-like pattern. 
     
     
         7 . The apparatus as set forth in  claim 6 , wherein the at least one injection section includes two injection sections which face each other so that a comb tooth of one of the two injection sections is located between respective comb teeth of the other of the two injection sections.