Method for manufacturing organic el apparatus, organic el apparatus, and electronic device

Abstract

A method for manufacturing an organic EL apparatus includes forming an organic EL element and a mounting terminal on a substrate of an element substrate as a first substrate, forming sealing films so as to cover at least the organic EL element and the mounting terminal, adhering a sealing substrate as a second substrate with respect to the element substrate using a filler, and etching the sealing films so as to expose at least a part of the mounting terminal, in which, in the etching of the sealing films, the second substrate, which is formed with a composition which reacts with an etching gas and vaporizes, or a protective member, which covers at least a part of the second substrate, is used as a mask.

What is claimed is: 
     
         1 . A method for manufacturing an organic EL apparatus, the method comprising:
 forming an organic EL element and a mounting terminal above a first substrate;   forming a sealing film from silicon oxynitride film so as to cover at least the organic EL element and the mounting terminal;   adhering a second substrate with respect to the first substrate using a filler; and   etching the sealing film so as to expose at least a part of the mounting terminal,   wherein, in the etching of the sealing film, the second substrate made of quartz glass is used as a mask.   
     
     
         2 . A method for manufacturing an organic EL apparatus, the method comprising:
 forming an organic EL element and a mounting terminal above a first substrate;   forming a first sealing film from silicon oxynitride film so as to cover at least the organic EL element and the mounting terminal;   forming a buffering film on the first sealing film;   forming a second sealing film from silicon oxynitride film so as to cover the buffering film and the mounting terminal;   adhering a second substrate with respect to the first substrate using a filler; and   etching the first sealing film and the second sealing film so as to expose at least a part of the mounting terminal,   wherein, in the etching of the first sealing film and the second sealing film, the second substrate made of quartz glass is used as a mask.   the sealing film has a silicon oxynitride film as a main component, and the second substrate is quartz glass.   
     
     
         3 . The method for manufacturing an organic EL apparatus according to  claim 2 ,
 wherein forming the first sealing film is performed by a vacuum vapor deposition method, a sputtering method, a CVD method, an ion plating method.   
     
     
         4 . The method for manufacturing an organic EL apparatus according to  claim 2 ,
 wherein forming the second sealing film is performed by a vacuum vapor deposition method, a sputtering method, a CVD method, an ion plating method.   
     
     
         5 . The method for manufacturing an organic EL apparatus according to  claim 2 ,
 wherein forming the buffering film is performed by using a solution which includes an epoxy resin and a solvent for the epoxy resin.   
     
     
         6 . The method for manufacturing an organic EL apparatus according to  claim 5 ,
 wherein forming the buffering film is performed by a printing method or a fixed-quantity discharge method, and carrying out drying.   
     
     
         7 . The method for manufacturing an organic EL apparatus according to  claim 2 ,
 wherein etching the first sealing film and the second sealing film is performed by dry etching which uses a fluorine-based processing gas.   
     
     
         8 . A method for manufacturing an organic EL apparatus, the method comprising:
 forming an organic EL element and a mounting terminal above a first substrate;   forming a sealing film so as to cover at least the organic EL element and the mounting terminal;   forming a color filter, which has a plurality of colored layer, on the sealing film;   coating a filler so as to cover the plurality of colored layer;   adhering a second substrate with respect to the first substrate using the filler; and   etching the sealing film so as to expose at least a part of the mounting terminal,   wherein, in the etching of the sealing film, the second substrate made of quartz glass is used as a mask.