Micro light emitting diode display panel and manufacturing method thereof

Abstract

Provided are a micro light emitting diode display panel and a manufacturing method thereof, and the display panel comprising a substrate and a plurality of micro light emitting diodes, and the substrate comprising a plurality of sub pixel regions arranged in array, and each of the sub pixels being provided with a groove, and an inner surface of the groove being covered with a first reflective electrode and a second reflective electrode which are insulated from each other, and each of the micro light emitting diodes being arranged in one of the grooves, and one pin of the micro light emitting diode being connected with the first reflective electrode and the other pin being connected with the second reflective electrode, and the first reflective electrode and the second reflective electrode reflect light emitted from the micro light emitting diode back to the groove.

What is claimed is: 
     
         1 . A micro light emitting diode display panel, comprising a substrate and a plurality of micro light emitting diodes, and the substrate comprising a plurality of sub pixel regions arranged in array, and each of the sub pixels being provided with a groove, and an inner surface of the groove being covered with a first reflective electrode and a second reflective electrode which are insulated from each other, and each of the micro light emitting diodes being arranged in one of the grooves, and one pin of the micro light emitting diode being connected with the first reflective electrode and the other pin being connected with the second reflective electrode, and the first reflective electrode and the second reflective electrode reflect light emitted from the micro light emitting diode back to the groove. 
     
     
         2 . The micro light emitting diode display panel according to  claim 1 , further comprising a reflective layer, and the reflective layer being located under the groove, and the reflective layer reflecting the light emitted from the micro light emitting diode back to the groove. 
     
     
         3 . The micro light emitting diode display panel according to  claim 1 , wherein a boss is arranged at a bottom of the groove, and the boss separates the first reflective electrode and the second reflective electrode. 
     
     
         4 . The micro light emitting diode display panel according to  claim 3 , wherein the micro light emitting diode is located on the boss, and the two pins of the micro light emitting diode are respectively located at two sides of the boss. 
     
     
         5 . The micro light emitting diode display panel according to  claim 1 , wherein a material of the first reflective electrode and the second reflective electrode is aluminum or silver. 
     
     
         6 . The micro light emitting diode display panel according to  claim 1 , wherein the plurality of micro light emitting diodes comprise red micro light emitting diodes, green micro light emitting diodes and blue micro light emitting diodes. 
     
     
         7 . The micro light emitting diode display panel according to  claim 1 , wherein all of the plurality of micro light emitting diodes are GaN micro light emitting diodes, InGaN micro light emitting diodes and AlGaInP micro light emitting diodes. 
     
     
         8 . A manufacturing method of a micro light emitting diode display panel, comprising:
 providing a substrate, and the substrate comprising a plurality of sub pixel regions arranged in array, and each of the sub pixels being provided with a groove;   forming a reflective electrode layer on the substrate, and the reflective electrode layer covering an inner surface of the groove;   forming a photoresist layer on the reflective electrode layer;   etching the reflective electrode layer through the photoresist layer to divide a portion of the reflective electrode layer at a bottom of the groove to form a first reflective electrode and a second reflective electrode;   locating a micro light emitting diode in the groove by a micro transfer printing method, wherein one pin of the micro light emitting diode is connected with the first reflective electrode and the other pin is connected with the second reflective electrode.   
     
     
         9 . The manufacturing method of the micro light emitting diode display panel according to  claim 8 , wherein a sputtering method or a heat evaporation method is used to form the reflective electrode layer on the substrate. 
     
     
         10 . The manufacturing method of the micro light emitting diode display panel according to  claim 8 , wherein the step of forming the reflective electrode layer on the substrate, and the reflective electrode layer covering the inner surface of the groove comprises coating polydiallyldimethylammonium chloride on an surface of the substrate, and coating negatively charged silver nanoparticles to form the reflective electrode layer.