Fabrication method of all solid-state thin-film battery

Abstract

A method of forming an all solid-state thin-film battery that can be scaled down and be integrated into a CMOS process is provided. The method includes a lift-off process in which battery material layers formed upon a patterned sacrificial material are removed from a bottom electrode, while battery material layers that are formed directly on a surface of the bottom electrode remain after performing the lift-off process. In some embodiments, a solid-state lithium based battery can be formed that includes a thin lithiated cathode material layer (thickness of less than 200 nm) composed of LiCoO 2 . Such a solid-state lithium based battery exhibits enhanced battery performance in terms of charge rate and specific charge capacity.

What is claimed is: 
     
         1 . A solid-state lithium-based battery comprising:
 a bottom electrode;   a lithiated cathode material layer on the bottom electrode, wherein the lithiated cathode material layer comprises LiCoO 2  and has a thickness of less than 200 nm;   a lithium-based solid-state electrolyte layer located on the lithiated cathode material layer; and   a top electrode located above the lithium-based solid-state electrolyte layer.   
     
     
         2 . The solid-state lithium-based battery of  claim 1 , further comprising an air and/or moisture impermeable structure located on physically exposed surfaces of the bottom electrode and surrounding each of the lithiated cathode material layer, the lithium-based solid-state electrolyte layer, and the top electrode. 
     
     
         3 . The solid-state lithium-based battery of  claim 1 , wherein the bottom electrode is located on a textured surface of a substrate. 
     
     
         4 . The solid-state lithium-based battery of  claim 1 , wherein the bottom electrode is located on a non-textured surface of a substrate. 
     
     
         5 . The solid-state lithium-based battery of  claim 1 , wherein the lithiated cathode material layer, the lithium-based solid-state electrolyte layer, and the top electrode have sidewall surfaces that are vertically aligned to each other. 
     
     
         6 . The solid-state lithium-based battery of  claim 1 , further comprising a lithium accumulation region located between the lithium-based solid-state electrolyte layer and the top electrode. 
     
     
         7 . The solid-state lithium-based battery of  claim 1 , wherein the thickness of the lithiated cathode material layer is from 40 nm to 90 nm. 
     
     
         8 . The solid-state lithium-based battery of  claim 1 , wherein the solid-state lithium-based battery has a charge rate of greater than 10 C, and a specific charge capacity of greater than 100 mAh/g.