US2018269351A1PendingUtilityA1
Indium gallium nitride light emitting devices
Est. expiryOct 16, 2032(~6.2 yrs left)· nominal 20-yr term from priority
H01L 33/32H01L 33/0075H01L 33/16H10H 20/825H10H 20/817H10H 20/0137
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Claims
Abstract
InGaN-based light-emitting devices fabricated on an InGaN template layer are disclosed.
Claims
exact text as granted — not AI-modified1 . A light emitting device comprising:
a gallium- and indium-containing nitride substrate; an n-type layer overlying the substrate; an active layer overlying then-type layer; and a p-type layer overlying the active layer; wherein the gallium- and indium-containing nitride substrate comprises a thickness greater than 4 μm and an InN composition greater than 0.5%.
2 . The light emitting device of claim 1 , wherein the substrate is characterized by a wurtzite crystal structure and a crystallographic orientation of a large area surface within about 5 degrees of one of the (0001) +c-plane and the (000-1) −c-plane.
3 . The light emitting device of claim 1 , wherein the substrate is substantially crack-free.
4 . The light emitting device of claim 1 , wherein the gallium- and indium-containing nitride substrate is relaxed, having a-axis and c-axis lattice constants within 0.1% of the equilibrium lattice constants for a specific indium-containing nitride composition.
5 . The light emitting device of claim 1 , wherein the gallium- and indium-containing nitride substrate is relaxed, having a-axis and c-axis lattice constants within 0.01% of the equilibrium lattice constants for a specific indium-containing nitride composition.
6 . The light emitting device of claim 1 , wherein the gallium- and indium-containing nitride substrate is relaxed, having a-axis and c-axis lattice constants within 0.001% of the equilibrium lattice constants for a specific indium-containing nitride composition.
7 . The light emitting device of claim 1 , further comprising at least one of, a lamp, a luminaire, and a lighting system, wherein the light emitting device is incorporated into the lamp, the luminaire, or the lighting system.
8 . A light emitting device comprising: a substrate;
an n-type layer overlying the substrate; an active layer overlying the n-type layer; and a p-type layer overlying the active layer; each of the n-type layer, the active layer, and the p-type layer is characterized by an in-plane lattice constant, wherein each of the in-plane lattice constants is greater, by at least 1%, than an in-plane lattice constant of similarly oriented GaN.
9 . The light emitting device of claim 8 , wherein the substrate is characterized by a wurtzite crystal structure and a crystallographic orientation of a large area surface within about 5 degrees of one of the (0001) +c-plane and the (000-1) −c-plane.
10 . The light emitting device of claim 8 , wherein the substrate is substantially crack-free.
11 . The light emitting device of claim 8 , wherein the substrate comprises gallium- and indium-containing nitride and is relaxed, having a-axis and c-axis lattice constants within 0.1% of the respective equilibrium lattice constants for a specific indium-containing nitride composition.
12 . The light emitting device of claim 8 , wherein the substrate comprises gallium- and indium-containing nitride and is relaxed, having a-axis and c-axis lattice constants within 0.01% of the respective equilibrium lattice constants for a specific indium-containing nitride composition.
13 . The light emitting device of claim 8 , wherein the substrate comprises gallium- and indium-containing nitride and is relaxed, having a-axis and c-axis lattice constants within 0.001% of the respective equilibrium lattice constants for a specific indium-containing nitride composition.
14 . The light emitting device of claim 8 , further comprising at least one of, a lamp, a luminaire, and a lighting system, wherein the light emitting device is incorporated into the lamp, the luminaire, or the lighting system.
15 . A method of fabricating a light emitting
device comprising: providing a substrate; selecting an InN composition; fabricating an InGaN template by growing an InGaN epitaxial layer having the selected InN composition on the substrate by hydride vapor phase epitaxy; and growing an optoelectronic device structure on the InGaN template.
16 . The method of claim 15 , wherein the growing of the InGaN epitaxial layer is characterized by a crystallographic orientation within about 5 degrees of [000-1].
17 . The method of claim 15 , wherein the substrate is substantially indium-free.
18 . The method of claim 15 , wherein the substrate comprises wurtzite GaN.
19 . The method of claim 15 , further comprising patterning the substrate to facilitate atom transport along glide planes to form misfit dislocations.
20 . The method of claim 15 , wherein growing the InGaN epitaxial layer having the selected InN composition on the substrate is performed by growing a series of graded layers having an intermediate InN composition.
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