Multi charged particle beam writing method and multi charged particle beam writing apparatus

Abstract

A multi charged particle beam writing method includes performing ON/OFF switching of a beam by an individual blanking system for the beam concerned, for each beam in multi-beams of charged particle beam, with respect to each time irradiation of irradiation of a plurality of times, by using a plurality of individual blanking systems that respectively perform beam ON/OFF control of a corresponding beam in the multi-beams, and performing blanking control, in addition to the performing ON/OFF switching of the beam for the each beam by the individual blanking system, with respect to the each time irradiation of the irradiation of the plurality of times, so that the beam is in an ON state during an irradiation time corresponding to irradiation concerned, by using a common blanking system that collectively performs beam ON/OFF control for a whole of the multi-beams.

1 - 7 . (canceled) 
     
     
         8 : A multi charged particle beam writing method comprising:
 generating, respectively, for each shot, irradiation time arrangement data, while using a sequence whose number of terms is a predetermined number, so that a total of values obtained by selecting or not selecting a value of each term of the sequence becomes an irradiation time of each beam of multi-beams of charged particle beam, wherein each value of the sequence is less than or equal to a value obtained by adding 1 to a sum of previous values up to a value just before the each value concerned; and   dividing, for each beam shot, irradiation of a beam concerned into irradiation performed a number of times equal to the number of terms of the sequence, wherein the sequence is equivalent to a combination of irradiations of irradiation time periods of the terms each indicating an irradiation time period of a corresponding value of the sequence, and irradiating the beam of the irradiation time period corresponding to a value of each selected term onto a target object in order, based on the irradiation time arrangement data.   
     
     
         9 : The method according to  claim 8 , wherein, with respect to the irradiation performed the number of times equal to the number of terms, a plurality of groups composed of a plurality of values each being the value of the each term of the sequence are set, and beam irradiation is performed for each of the plurality of groups in order.