Sensor assembly for rotating devices and methods for fabricating

Abstract

A sensor assembly is described herein. The sensor assembly includes a housing that includes an inner surface that defines a cavity within the housing, and a proximity sensor positioned within the cavity. The proximity sensor includes a first connector, a second connector, and a substantially planar sensing coil that extends between the first connector and the second connector. The sensing coil extends outwardly from the first connector such that the second connector is radially outwardly from the first connector.

1 - 16 . (canceled) 
     
     
         17 . A method of fabricating a sensor assembly for use with a device, said method comprising:
 depositing a photoresist material across an outer surface of a sensing coil substrate material;   developing a photoresist pattern on the sensing coil substrate material with a shape that is substantially similar to a shape of a proximity sensor that includes a first connector, a second connector, and a substantially planar sensing coil that extends between the first connector and the second connector; and   etching the sensor substrate material to form a proximity sensor.   
     
     
         18 . The method of  claim 17 , further comprising forming the sensing coil substrate material including one of a titanium and a superalloy. 
     
     
         19 . The method of  claim 17 , further comprising:
 forming a housing including a cavity sized to receive the sensing coil therein; and   inserting the sensing coil into the housing cavity to form the proximity sensor.   
     
     
         20 . The method of  claim 17 , further comprising forming the sensing coil including a substantially spiral shape extending between the first connector and the second connector such that the second connector is oriented radially outwardly from the first connector. 
     
     
         21 . The method of  claim 17 , wherein the planar sensing coil is configured to operate in environments that include operating temperatures within a temperature range of −200° C. to 1000° C.