US2018245199A1PendingUtilityA1
Mask frame assembly and method of manufacturing the same
Est. expiryJun 23, 2034(~7.9 yrs left)· nominal 20-yr term from priority
G03F 1/86G03F 1/68G03F 1/64G03F 1/62G03F 1/60G03F 1/50C23C 16/042B32B 38/10B32B 37/025B32B 3/266C23C 14/50H10K 59/88C23C 14/042H10K 71/166H01L 51/0011H01L 27/3223G03F 1/14G03F 1/16H01L 51/56H10K 71/00
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Claims
Abstract
A mask frame assembly for manufacturing a display device, and a method of manufacturing the mask frame assembly are disclosed. In one aspect, the mask frame assembly includes a frame having at least one opening portion defined therein. The mask frame assembly further includes a polymer film having a plurality of slits defined therein and combined to the frame.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A mask frame assembly for manufacturing a display device, the mask frame assembly comprising:
a frame having at least one opening portion defined therein; and a polymer film having a plurality of slits defined therein and combined to the frame.
2 . The mask frame assembly of claim 1 , wherein the frame is formed at least partially of a metal.
3 . The mask frame assembly of claim 1 , further comprising an adhesive layer being interposed between the frame and the polymer film and adhering the frame and the polymer film.
4 . The mask frame assembly of claim 2 , further comprising an adhesive layer being interposed between the frame and the polymer film and adhering the frame and the polymer film.
5 . The mask frame assembly of claim 1 , wherein the polymer film comprises one or more of: polyimide, polyphenylene sulfide, polyaryletherketone, and liquid crystal polymer.
6 . The mask frame assembly of claim 5 , wherein the polymer film comprises a pattern portion and the slits are formed on the pattern portion.
7 . The mask frame assembly of claim 6 , wherein the pattern portion comprises a plurality of pattern portions, wherein the at least one opening portion comprises a plurality of opening portions, and wherein the number of the pattern portions is the same as the number of the opening portions.
8 . The mask frame assembly of claim 7 , wherein the lengths and widths of the opening portions are substantially the same.
9 . The mask frame assembly of claim 6 , wherein the opening portion is formed in a location corresponding to the pattern portion.
10 . The mask frame assembly of claim 9 , wherein the opening portion is formed substantially directly below the pattern portion.
11 . The mask frame assembly of claim 1 , wherein the thickness of the polymer film is in the range from about 10 μm to about 50 μm.
12 . The mask frame assembly of claim 1 , wherein the polymer film has a coefficient of thermal expansion (CTE) of about 3 ppm/° C. or less.Join the waitlist — get patent alerts
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