Vacuum pump

Abstract

A multi-stage vacuum pump may include first and second half-shell stator components defining a plurality of pumping chambers and for assembly together along respective longitudinally extending faces; first and second end stator components for assembly at respective longitudinal end faces of the first and second half-shell stator components; longitudinal seals for sealing between the first and second half-shell stator components when assembled together at the longitudinally extending faces; and annular seals for sealing between the first and second end stator components and the first and second half-shell stator components when assembled; the annular sealing members and the longitudinal sealing members forming a planar sealing interface therebetween.

1 . A multi-stage vacuum pump comprising:
 first and second half-shell stator components defining a plurality of pumping chambers for assembly together along respective pairs of mutually engaging longitudinally extending sealing faces;   first and second end stator components for assembly at respective pairs of mutually engaging end sealing faces of the end stator components and the first and second half-shell stator components;   longitudinal sealing members for sealing between each pair of mutually engaging longitudinally extending sealing faces; and   annular sealing members for sealing between each pair of mutually engaging end sealing faces;   wherein the sealing interfaces between the annular and the longitudinal sealing members are planar.   
     
     
         2 . The multi-stage vacuum pump as claimed in  claim 1 , wherein the annular sealing members have respective generally planar sealing surface portions for sealing against generally planar end sealing surfaces of the longitudinal sealing members. 
     
     
         3 . The multi-stage vacuum pump as claimed in  claim 1 , wherein the profiles in cross-section of the generally planar sealing surface portions are rectilinear. 
     
     
         4 . The multi-stage vacuum pump as claimed in  claim 3 , wherein the profiles in cross-section of the annular sealing members are rectilinear throughout their circumference. 
     
     
         5 . The multi-stage vacuum pump as claimed in  claim 1 , wherein the end stator components each comprise an annular channel in the end sealing face thereof for receiving one of the annular sealing members. 
     
     
         6 . The multi-stage vacuum pump as claimed in  claim 1 , wherein the assembled half-shell stator components comprise at each end sealing face an annular channel for receiving one of the annular sealing members. 
     
     
         7 . The multi-stage vacuum pump as claimed in  claim 5 , wherein the annular channels are shaped and sized to complement the annular sealing members. 
     
     
         8 . The multi-stage vacuum pump as claimed in  claim 5 , wherein the annular channels are uniformly rectilinear in profile throughout their circumference. 
     
     
         9 . The multi-stage vacuum pump as claimed in  claim 2 , wherein the profiles in cross-section of the generally planar sealing surface portions are rectilinear. 
     
     
         10 . The multi-stage vacuum pump as claimed in  claim 9 , wherein the profiles in cross-section of the annular sealing members are rectilinear throughout their circumference. 
     
     
         11 . The multi-stage vacuum pump as claimed in  claim 2 , wherein the end stator components each comprise an annular channel in the end sealing face thereof for receiving one of the annular sealing members. 
     
     
         12 . The multi-stage vacuum pump as claimed in  claim 3 , wherein the end stator components each comprise an annular channel in the end sealing face thereof for receiving one of the annular sealing members. 
     
     
         13 . The multi-stage vacuum pump as claimed in  claim 4 , wherein the end stator components each comprise an annular channel in the end sealing face thereof for receiving one of the annular sealing members. 
     
     
         14 . The multi-stage vacuum pump as claimed in  claim 2 , wherein the assembled half-shell stator components comprise at each end sealing face an annular channel for receiving one of the annular sealing members. 
     
     
         15 . The multi-stage vacuum pump as claimed in  claim 3 , wherein the assembled half-shell stator components comprise at each end sealing face an annular channel for receiving one of the annular sealing members. 
     
     
         16 . The multi-stage vacuum pump as claimed in  claim 4 , wherein the assembled half-shell stator components comprise at each end sealing face an annular channel for receiving one of the annular sealing members. 
     
     
         17 . The multi-stage vacuum pump as claimed in  claim 5 , wherein the assembled half-shell stator components comprise at each end sealing face an annular channel for receiving one of the annular sealing members. 
     
     
         18 . The multi-stage vacuum pump as claimed in  claim 6 , wherein the assembled half-shell stator components comprise at each end sealing face an annular channel for receiving one of the annular sealing members. 
     
     
         19 . The multi-stage vacuum pump as claimed in  claim 6 , wherein the annular channels are uniformly rectilinear in profile throughout their circumference. 
     
     
         20 . The multi-stage vacuum pump as claimed in  claim 7 , wherein the annular channels are uniformly rectilinear in profile throughout their circumference.