High Throughput Vacuum Deposition Sources and System

Abstract

A high throughput deposition apparatus includes a first process chamber; one or more first deposition sources in the first process chamber; a first main carrier comprising a plurality of first sub-carriers each configured to carry one or more substrate each positioned around an axial direction and configured to receive a first deposition material from the one or more first deposition sources, wherein the first sub-carriers define a curved surface around the axial direction; and a transport mechanism configured to move the first main carrier along the axial direction through the first process chamber.

What is claimed is: 
     
         1 . A high throughput deposition apparatus, comprising:
 a first process chamber;   a plurality of first deposition sources in a first process chamber, wherein each of the first deposition sources is configured to produce vapor for chemical vapor deposition (CVD) or plasma enhanced chemical vapor deposition (PECVD) to deliver a first deposition material toward a central region in the first process chamber;   a first main carrier comprising a plurality of first sub-carriers each configured to carry one or more substrates facing outward and configured to receive the first deposition material from the plurality of first deposition sources, wherein the first main carrier comprises a first rail edge in an axial direction,   a second main carrier comprising a plurality of second sub-carriers each configured to carry one or more substrates facing outward and configured to receive the first deposition material from the plurality of first deposition sources, wherein the second main carrier comprises a second rail edge in the axial direction,   wherein the first main carrier and the second main carrier form an inner closed loop that defines a cylindrical space therein along the axial direction, and the plurality of first deposition sources form an outer closed loop outside and around the inner closed loop; and   a transport mechanism configured to move the first main carrier and the second main carrier along the axial direction through the first process chamber, wherein the transport mechanism comprises wheels configured to roll along the first rail edge and the second rail edge, which respectively move the first main carrier and the second main carrier along the axial direction.   
     
     
         2 . The high throughput deposition apparatus of  claim 1 , wherein the first sub-carriers define a first curved surface around the axial direction. 
     
     
         3 . The high throughput deposition apparatus of  claim 1 , wherein the second sub-carriers define a second curved surface around the axial direction. 
     
     
         4 . The high throughput deposition apparatus of  claim 1 , wherein the first main carrier and the second main carrier are separated by a gap aligned along the axial direction. 
     
     
         5 . The high throughput deposition apparatus of  claim 4 , wherein the first rail edge and the second rail edge are separated by the gap. 
     
     
         6 . The high throughput deposition apparatus of  claim 4 , further comprising:
 a deposition shield positioned between the gap on sides of the first main carrier and the second main carrier opposite to the plurality of first deposition sources, wherein the deposition shield is configured to block a portion of the first deposition material from the plurality of first deposition sources.   
     
     
         7 . The high throughput deposition apparatus of  claim 6 , wherein the deposition shield comprises a web that is moveable by one or more rollers. 
     
     
         8 . The high throughput deposition apparatus of  claim 1 , wherein the first sub-carriers are defined by polygon shaped surfaces positioned around the axial direction. 
     
     
         9 . The high throughput deposition apparatus of  claim 1 , further comprising:
 a rotation mechanism configured to rotate at least one of the plurality of first sub-carriers and one of the one or more substrates carried by one of the plurality of first sub-carriers.   
     
     
         10 . The high throughput deposition apparatus of  claim 1 , wherein at least one of the plurality of first sub-carriers is configured to carry two substrates on two opposing surfaces of one of the plurality of first sub-carriers. 
     
     
         11 . The high throughput deposition apparatus of  claim 1 , further comprising:
 an entrance load lock chamber; and   an entrance buffer chamber that connects the entrance load lock chamber and the first processing chamber, wherein transport mechanism is configured to move the first main carrier along the axial direction through the entrance load lock chamber, entrance buffer chamber, and the first process chamber.   
     
     
         12 . The high throughput deposition apparatus of  claim 1 , further comprising:
 a first gate valve at an entrance to the first process chamber, wherein the first gate valve is configured to open to allow the first main carrier to move into the first process chamber, wherein the first gate valve is configured to close to provide vacuum seal for the first process chamber; and   a second gate valve at an exit to the first process chamber, wherein the second gate valve is configured to open to allow the first main carrier to move out of the first process chamber, wherein the second gate valve is configured to close to provide vacuum seal for the first process chamber.   
     
     
         13 . The high throughput deposition apparatus of  claim 12 , wherein at least one of the first gate valve and the second gate valve includes two half circles or half polygons configured to open and close. 
     
     
         14 . The high throughput deposition apparatus of  claim 1 , further comprising:
 a heater in an entrance buffer chamber and configured to heat the first sub-carriers in the first main carrier.   
     
     
         15 . The high throughput deposition apparatus of  claim 1 , further comprising:
 a second process chamber; and   one or more second deposition sources in the second process chamber;   wherein each of the first sub-carriers is configured to carry a substrate configured to receive a second deposition material from the one or more second deposition sources,   wherein the transport mechanism configured to move the first main carrier along the axial direction through the second process chamber.   
     
     
         16 . The high throughput deposition apparatus of  claim 15 , further comprising:
 a process buffer chamber between the first process chamber and the second process chamber,   wherein the transport mechanism configured to move the first main carrier along the axial direction through the process buffer chamber.   
     
     
         17 . The high throughput deposition apparatus of  claim 15 , further comprising:
 an exit lock chamber; and   an exit buffer chamber between the first process chamber and the exit lock chamber,   wherein the transport mechanism configured to move the first main carrier along the axial direction through the exit lock chamber and the exit buffer chamber.   
     
     
         18 . The high throughput deposition apparatus of  claim 1 , wherein the plurality of first deposition sources form an outer closed loop around the axial direction. 
     
     
         19 . The high throughput deposition apparatus of  claim 1 , wherein the plurality of first deposition sources are distributed in an outer closed loop around the axial direction. 
     
     
         20 . The high throughput deposition apparatus of  claim 1 , wherein the plurality of first deposition sources include shower heads each of which is configured to deliver a vapor of the first deposition material toward a central region in the first process chamber. 
     
     
         21 . The high throughput deposition apparatus of  claim 1 , further comprising:
 one or more electromagnet that form magnetic field over the plurality of first deposition sources.   
     
     
         22 . The high throughput deposition apparatus of  claim 1 , further comprising:
 permanent magnets that form magnetic magnet field over the plurality of first deposition sources.   
     
     
         23 . The high throughput deposition apparatus of  claim 22 , wherein the permanent magnets form a closed loop outside the deposition sources. 
     
     
         24 . The high throughput deposition apparatus of  claim 1 , wherein at least one of the first deposition sources is configured to produce vapor for removal of a material from a substrate.