Optical modulating device and system including the same

Abstract

Provided are an optical modulating device and a system including the optical modulating device. The optical modulating device includes a substrate, and a phase modulator formed on the substrate and including a Fabry-Perot cavity. The Fabry-Perot cavity of the phase modulator includes a first reflective layer, a second reflective layer, and a tunable core formed between the first reflective layer and the second reflective layer, wherein the tunable core is formed of a semiconductor material and is configured to modulate a phase of light corresponding to modulation of a refractive index of the tunable core according to electrical control.

What is claimed is: 
     
         1 . An optical modulating device comprising:
 a substrate; and   a phase modulator formed on the substrate and comprising a Fabry-Perot cavity,   wherein the Fabry-Perot cavity of the phase modulator comprises:
 a first reflective layer; 
 a second reflective layer; and 
 a tunable core formed between the first reflective layer and the second reflective layer, 
 wherein the tunable core is formed of a semiconductor material and is configured to modulate a phase of light based on modulation of a refractive index of the tunable core by electrical control of the tunable core. 
   
     
     
         2 . The optical modulating device of  claim 1 , wherein the tunable core comprises a quantum well configured to modulate a phase of light based on the modulation of the refractive index of the tunable core by electrical control. 
     
     
         3 . The optical modulating device of  claim 2 , wherein the tunable core comprises a multi-quantum well. 
     
     
         4 . The optical modulating device of  claim 3 , wherein the multi-quantum well comprises a Group III-V semiconductor. 
     
     
         5 . The optical modulating device of  claim 1 , wherein the tunable core comprises a bulk semiconductor region configured to modulate a phase of light based on the modulation of the refractive index of the tunable core by electrical control. 
     
     
         6 . The optical modulating device of  claim 1 , wherein at least one from among the first reflective layer and the second reflective layer comprises a distributed Bragg reflector. 
     
     
         7 . The optical modulating device of  claim 6 , wherein the distributed Bragg reflector of the at least one from among the first reflective layer and the second reflective layer comprises a dielectric material, and the Fabry-Perot cavity forms a dielectric tunable core. 
     
     
         8 . The optical modulating device of  claim 1 , further comprising a common electrode between the first reflective layer and the tunable core. 
     
     
         9 . The optical modulating device of  claim 1 , wherein the first reflective layer is formed on the substrate, the tunable core is formed on the first reflective layer, the second reflective layer is formed on the tunable core, and
 the Fabry-Perot cavity comprises a protrusion protruding from the first reflective layer, the protrusion comprising the tunable core and the second reflective layer.   
     
     
         10 . The optical modulating device of  claim 9 , wherein the second reflective layer has a size corresponding to the tunable core. 
     
     
         11 . The optical modulating device of  claim 9 , wherein the protrusion comprises a plurality of protrusions spaced apart from each other. 
     
     
         12 . The optical modulating device of  claim 11 , wherein the phase modulator is included in driving units. 
     
     
         13 . The optical modulating device of  claim 12 , wherein the phase modulator is arranged in a plurality of arrays two-dimensionally and is configured to form a two-dimensional optical modulator. 
     
     
         14 . The optical modulating device of  claim 12 , wherein the phase modulator is arranged in a plurality of arrays one-dimensionally and is configured to form a one-dimensional optical modulator. 
     
     
         15 . The optical modulating device of  claim 9 , wherein the protrusion further comprises:
 an additional tunable core formed on the second reflective layer; and   a third reflective layer formed on the additional tunable core,   wherein the Fabry-Perot cavity has a dual cavity structure.   
     
     
         16 . A light detecting and ranging (LIDAR) apparatus comprising:
 a light source configured to emit light;   the optical modulating device of  claim 1 , configured to steer light emitted from the light source toward an object; and   a sensor configured to receive light that is steered by the optical modulating device toward the object and reflected by the object.   
     
     
         17 . The LIDAR apparatus of  claim 16 , wherein the tunable core comprises a quantum well or a bulk semiconductor region that is formed using a Group III-V semiconductor and is configured to modulate a phase of light based on the modulation of the refractive index of the tunable core by electrical control. 
     
     
         18 . The LIDAR apparatus of  claim 16 , wherein at least one from among the first reflective layer and the second reflective layer comprises a distributed Bragg reflector,
 wherein the distributed Bragg reflector comprises a dielectric material,   wherein the Fabry-Perot cavity forms a dielectric tunable core.   
     
     
         19 . The LIDAR apparatus of  claim 16 , wherein the first reflective layer is formed on the substrate, the tunable core is formed on the first reflective layer, and the second reflective layer is formed on the tunable core, and
 the Fabry-Perot cavity comprises a protrusion protruding from the first reflective layer, the protrusion comprising the tunable core and the second reflective layer.   
     
     
         20 . The LIDAR apparatus of  claim 19 , wherein the protrusion further comprises:
 an additional tunable core formed on the second reflective layer; and   a third reflective layer formed on the additional tunable core,   wherein the Fabry-Perot cavity has a dual cavity structure.