Methods for detecting and analyzing surface films

Abstract

Disclosed herein are embodiments of a novel method and system to analyze films using plasma to produce spectral data and analyzing the spectral data.

What is claimed is: 
     
         1 . A system for analyzing a film comprising
 a film;   a plasma; and   a spectral data recording device.   
     
     
         2 . The system according to  claim 1 , wherein the film is deposited on a substrate. 
     
     
         3 . The system according to  claim 2 , wherein the substrate comprises a metal, semiconductor, glass or ceramic. 
     
     
         4 . The system according to  claim 1 , comprising an optical emissions spectrometer. 
     
     
         5 . The system according to  claim 1 , wherein the system is capable of determining the composition of the film. 
     
     
         6 . The system according to  claim 5 , wherein the system is capable of determining the presence of an element. 
     
     
         7 . The system according to  claim 6 , wherein the element is selected from the group consisting of carbon, oxygen, fluorine, phosphorous, chlorine, sodium, sulfur, silicon, boron and combinations thereof. 
     
     
         8 . The system according to  claim 5 , wherein the system is capable of determining the presence of a molecular fragment. 
     
     
         9 . The system according to  claim 8 , wherein the molecular fragment is selected from the group consisting of C—O, C—N, P—O and combinations thereof. 
     
     
         10 . The system according to  claim 1 , wherein the system is capable of analyzing spectral lines across varying wavelengths and/or analyzing an intensity of the spectral lines at a selected wavelength. 
     
     
         11 . The system according to  claim 1 , wherein the plasma comprises argon plasma, helium plasma, hydrogen plasma or oxygen plasma. 
     
     
         12 . The system according to  claim 2 , wherein the film is attached to the substrate through covalent bonds or through non-covalent bonds. 
     
     
         13 . The system according to  claim 1 , wherein the film is selected from the group consisting of oxide, alkoxide, mixed oxide-alkoxide, phosphonate or organophosphonate. 
     
     
         14 . The system according to  claim 1 , wherein the film is organic. 
     
     
         15 . The system according to  claim 1 , wherein the film is inorganic. 
     
     
         16 . The system according to  claim 1 , wherein the film is continuous. 
     
     
         17 . The system according to  claim 1 , wherein the film is dispersed. 
     
     
         18 . The system according to  claim 1 , wherein the film is a mono- or multilayer film. 
     
     
         19 . The system according to  claim 1 , wherein the film has a thickness ranging from about 0.001 μm to about 1 μm. 
     
     
         20 . The system according to  claim 1 , wherein the film has a thickness of about 0.5 μm or less. 
     
     
         21 . The system according to  claim 1 , wherein the film comprises a pattern or micropattern. 
     
     
         22 . The system according to  claim 2 , wherein the substrate is selected from the group consisting of a metal, alloy, polymer, plastic, ceramic, silicon, glass, tissue and fabric. 
     
     
         23 . The system according to  claim 2 , wherein the substrate is a metal selected from the group consisting of titanium, stainless steel, cobalt, chrome, nickel, molybdenum, tantalum, zirconium, magnesium, manganese, niobium, iron, gold, copper, aluminum, silver, platinum, vanadium, tin, palladium, iridium, antimony, bismuth, zinc, tungsten and alloys thereof. 
     
     
         24 . The system according to  claim 2 , wherein the substrate is a polymer or plastic. 
     
     
         25 . The system according to  claim 1 , wherein the substrate is a medical device.