US2018173345A1PendingUtilityA1

System and Method for Producing a Nano Metal Mesh using a Brittle Film Template for Lithography

Assignee: PFEIFFER ETHANPriority: Sep 21, 2015Filed: Feb 12, 2018Published: Jun 21, 2018
Est. expirySep 21, 2035(~9.2 yrs left)· nominal 20-yr term from priority
Inventors:Ethan Pfeiffer
H10P 76/403B82Y 40/00Y10S148/10Y10S977/857G06F 3/044Y10S977/893H01L 21/0331B81C 1/00476Y10S977/856G06F 2203/04103B81C 1/00031C23F 1/16B81B 2203/04G06F 2203/04112
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Claims

Abstract

This disclosure teaches a method for producing a nano metal mesh. A brittle layer can be deposited onto a flexible substrate, the brittle layer having a thickness on the flexible substrate. The flexible substrate can be bent to produce a plurality of gaps on the brittle material. A material can be deposited at the surface of the flexible substrate filling the gaps of the brittle layer. Then, the brittle layer can be etched from the flexible substrate using an etchant, a nano metal mesh formed by the material previously in the gaps. The disclosure also teaches a nano metal mesh made using this method.

Claims

exact text as granted — not AI-modified
1 . A nano metal mesh manurfactured by
 depositing a brittle layer onto a flexible substrate, said brittle layer having a thickness on said flexible substrate;   bending said flexible substrate to produce a plurality of gaps on said brittle material;   depositing a material at the surface of said flexible substrate filling said gaps of said brittle layer;   etching said brittle layer from said flexible substrate using an etchant, a nano metal mesh formed by said material previously in said gaps.   
     
     
         2 . The nano metal mesh of  claim 1  wherein said flexible substrate is a bendable Optical grade Poly-ethylene Terephthalate (PET) film. 
     
     
         3 . The nano metal mesh of  claim 1  wherein said brittle layer comprises a Spin On Glass (SOG) liquid glass. 
     
     
         4 . The nano metal mesh of  claim 1  wherein said water solution is a Sodium Chloride (NaCl) water solution. 
     
     
         5 . The system of  claim 1  wherein said etchant is a hydrofluoric acid solution.

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