Substrate transfer device

Abstract

A substrate transfer device 1 includes a casing 8 and a substrate conveying robot 7 . A size of the casing 8 in a second direction Y is more than a size of the casing 8 in a first direction X. The casing 8 includes walls ( 81 to 85 ) forming a conveying chamber 80 and at least one opening 86 or 87 provided at least one side of the conveying chamber 80 in the first direction X. The substrate conveying robot 7 includes a base 73 , a robot arm 71 , a robot hand 72 , and a controller 74 . When a space in the conveying chamber 80 except for a predetermined exclusive region 80 E is defined as an effective conveying chamber 80 A, an entire link length DL of a link 75 or 76 is less than a conveying chamber size Dx, and an entire hand length Dh of the robot hand 72 is not less than an effective conveying chamber size Dx′.

1 . A substrate transfer device comprising:
 a casing configured such that when a certain horizontal direction is defined as a first direction, and another horizontal direction orthogonal to the first direction is defined as a second direction, a size of the casing in the second direction is more than a size of the casing in the first direction, the casing including walls forming a conveying chamber and at least one opening provided at at least one side of the conveying chamber in the first direction; and   a load port provided at one of the walls,   a substrate conveying robot including
 a base, 
 a robot arm provided in the conveying chamber and constituted by at least one link supported by the base, 
 a robot hand coupled to a wrist portion of the robot arm and configured to hold a substrate, and 
 a controller configured to control operations of the robot arm and the robot hand, wherein 
 an entire link length of the at least one link is less than a length between the load port provided at one of the walls and the other wall, and an entire hand length of the robot hand is not less than a length between the load port provided at one of the walls and the other wall. 
   
     
     
         2 . The substrate transfer device according to  claim 1 , wherein the entire hand length of the robot arm is more than a size of the conveying chamber in the first direction. 
     
     
         3 . The substrate transfer device according to  claim 1 , wherein the robot hand includes:
 a reference portion coupled to the wrist portion of the robot arm;   a movable portion coupled to the reference portion so as to be displaceable relative to the reference portion; and   a movement mechanism configured to displace the movable portion relative to the reference portion.