Optical device having a deformable optical element

Abstract

The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

1 .- 20 . (canceled) 
     
     
         21 . An optical device, comprising:
 an optical module comprising an optical element and a holding device that holds the optical element; and   a support structure supporting the optical module,   wherein:
 the holding device comprises a deformation device comprising a plurality of active deformation units contacting the optical element; 
 the plurality of active deformation units are configured to impose a pre-defined deformation on the optical element; and 
 the optical module replaceable manner. 
   
     
     
         22 . The optical device of  claim 21 , wherein:
 the holding device includes a holding structure supporting the optical element; and   the holding structure is detachably connected to the support structure in an area of a first supporting point.   
     
     
         23 . The optical device of  claim 22 , wherein:
 the holding structure is adjustably connected to the support structure in the area of the supporting point; and   the adjustment unit is actively controllable.   
     
     
         24 . The optical device of  claim 22 , wherein:
 the supporting point comprises a first supporting point;   the holding structure supports the optical element in an area of a second supporting point; and   the second supporting point is located in the area of the first supporting point.   
     
     
         25 . The optical device of  claim 21 , wherein:
 the holding device supports the optical element via a holding unit in a supporting direction; and   the holding unit is formed to be substantially rigid in the supporting direction.   
     
     
         26 . The optical device of  claim 25 , wherein:
 the holding unit comprises an active positioning unit; and   the holding unit is configured to adjust a position of the optical element and/or an orientation of the optical element.   
     
     
         27 . The optical device of  claim 21 , wherein:
 the plurality of deformation units comprises a first deformation unit;   the first deformation unit is configured to impose a deformation force in a deformation direction on the optical element; and   the first deformation unit comprises an actuator unit configured to generate the deformation force.   
     
     
         28 . The optical device of  claim 27 , wherein:
 the actuator unit is configured to generate a force in an actuation direction or a momentum in an actuation direction; and   the actuator unit has a high rigidity in the actuation direction.   
     
     
         29 . The optical device of  claim 28 , further comprising a transmission element disposed in a force flux between the actuator unit and the optical element, wherein:
 the transmission element has a low rigidity in a direction of force;   the transmission element has a rigidity in the actuation direction, which is related to the location of the actuator unit; and   the rigidity of the transmission element corresponds to at most 1% of the rigidity of the actuator unit in the actuation direction.   
     
     
         30 . The optical device of  claim 28 , wherein:
 the holding device comprises a holding structure that supports the optical element;   the actuator unit is supported on the holding structure in the actuation direction;   the holding structure has a rigidity in the actuation direction, which is related to the location of the actuator unit; and   the rigidity of the holding structure corresponds to at least 5% to 10% of the rigidity of the actuator unit in the actuation direction.   
     
     
         31 . The optical device of  claim 21 , wherein:
 the holding device comprises a holding structure that holds the optical element;   the deformation units contact the holding structure;   a measuring device is provided which comprises a reference structure connected to the holding structure and a measuring unit;   the measuring unit is configured to capture a measurement value representative of a distance between the reference structure and a measuring point of the optical element; and   the measuring device is configured to determine, based on the first measurement value, a detection value representative of a deformation of the optical element.   
     
     
         32 . The optical device of  claim 31 , wherein:
 the support structure supports the optical module in an area of a first supporting point;   the holding structure supports the measuring device in the area of a second supporting point; and   the second supporting point is located in the area of first supporting point.   
     
     
         33 . The optical device of  claim 31 , wherein:
 a deformation unit is configured to impose a displacement on the optical element in a deformation direction; and   the deformation unit has a high rigidity in the deformation direction.   
     
     
         34 . The optical device of  claim 22 , wherein:
 the deformation device comprises a separate abutment structure which is fixed to the holding structure; and   a deformation unit is supported on the abutment structure.   
     
     
         35 . An optical imaging device, comprising:
 an illumination device comprising an optical device according to claim  1 , the illumination device configured to illuminate a pattern; and   a projection device comprising an optical element group configured image the illuminated pattern onto an object.   
     
     
         36 . A method, comprising:
 replacably holding a microlithography optical element with a holding device of an optical module, the optical module supported by a support structure; and   imposing a pre-defined deformation on the microlithography optical element via a plurality of active deformation units.   
     
     
         37 . The method of  claim 36 , wherein the holding device is adjustably connected to the support structure in an area of a supporting point via an adjustment unit that is actively controllable. 
     
     
         38 . The method of  claim 36 , wherein:
 the microlithography optical element is supported by a holding unit of the holding device in a supporting direction; and   the holding unit is substantially rigid in the supporting direction.   
     
     
         39 . The method of  claim 38 , wherein:
 the holding unit comprises an active positioning unit; and   the holding unit adjusts a position of the microlithography optical element and/or an orientation of the microlithography optical element.   
     
     
         40 . The method of  claim 36 , wherein:
 the holding device comprises a holding structure that holds the optical element;   the deformation units contact the holding structure;   a measuring unit is provided which includes a reference structure connected to the holding structure and a measuring unit;   the measuring unit captures a measurement value representative of a distance between the reference structure and a measuring point of the microlithography optical element; and   the measuring device determines, using the first measurement value, a detection value representative of a deformation of the of the microlithography optical element.   
     
     
         41 . The method of  claim 40 , wherein:
 a deformation unit imposes a displacement on the optical element in a deformation direction; and the deformation unit has a high rigidity in the deformation direction.   
     
     
         42 . The method of  claim 36 , wherein:
 the deformation device comprises a separate abutment structure fixed to the holding structure; and   a deformation unit is supported on the abutment structure.   
     
     
         43 . A set of components for an optical device, comprising:
 an optical module comprising an optical element and a holding device;   a support structure; and   an optical replacement module,   wherein:
 the support structure supports the optical module in a first condition of the optical device; 
 the holding device holds the optical element; 
 the holding device comprises a deformation device comprising a plurality of active deformation units contacting the optical element; 
 the plurality of deformation units are configured to impose a pre-defined deformation on the optical element; 
 the optical module is fixed to the support structure in a replaceable manner via a supporting point; 
 the optical replacement module is configured to take the place of the optical module in a second condition of the optical device and to be fixed to the support structure via the at least one supporting point. 
   
     
     
         44 . The set of components of  claim 43 , wherein:
 the optical replacement module comprises a further microlithography optical element and a further holding device;   the further holding device holds the further optical element;   the further holding device comprises a further deformation device comprising a plurality of further active deformation units contacting the further optical element; and   the plurality of further active deformation units are configured to impose a pre-defined deformation on the further optical element.