US2018112666A1PendingUtilityA1

Vacuum pump system

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Assignee: LEYBOLD GMBHPriority: Jun 26, 2015Filed: Jun 20, 2016Published: Apr 26, 2018
Est. expiryJun 26, 2035(~8.9 yrs left)· nominal 20-yr term from priority
Inventors:Thomas DreifertRoland MullerMax PelikanDirk SchillerDaniel SchneidenbachDirk Stratmann
F04C 28/26F04C 28/02F04C 28/065F04C 25/02F04C 28/06F04C 2240/70F04B 49/06F04C 23/001F04B 41/06F04B 37/14
33
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Claims

Abstract

A vacuum pump system comprising a plurality of vacuum pumps which are connected to one another in parallel and are each connected on an inlet side to a chamber, having an outlet line which is connected on the outlet side of the vacuum pumps, and an intermediate line which connects the inlet side of at least one vacuum pump to the outlet line, wherein all the vacuum pumps are connected in parallel during a pumping-out period and at least one of the vacuum pumps is connected in parallel with the other vacuum pumps as a backing pump during an idle period.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A vacuum pump system having a plurality of vacuum pumps which are connected in parallel with each other and are each connected on an inlet side with a chamber, having an outlet line which is connected with the outlet side of said vacuum pumps, and an intermediate line connecting the inlet side of at least one vacuum pump with said outlet line,
 wherein   during a pumping-out period all vacuum pumps are connected in parallel, and during an idle period the inlet side of at least one of said vacuum pumps is connected with the outlet side of the remaining vacuum pumps as a backing pump.   
     
     
         2 . The vacuum pump system according to  claim 1 , wherein during the idle period the vacuum pump whose inlet side is connected with the outlet side of the remaining vacuum pumps is connected in series with the other vacuum pumps. 
     
     
         3 . The vacuum pump system according to  claim 1 , wherein the outlet side of the vacuum pump is connected with the outlet line via a check valve. 
     
     
         4 . The vacuum pump system according to  claim 1 , wherein in front of each of the vacuum pumps a valve is arranged, as well as in particular another valve is arranged in the intermediate line for controlling a parallel or series connection of the individual vacuum pumps with each other. 
     
     
         5 . The vacuum pump system according to  claim 1 , wherein the at least one of the vacuum pumps whose inlet side is connected with the outlet side of the remaining vacuum pumps in the idle state and which is in particular connected in series with the other vacuum pumps is smaller dimensioned than the other vacuum pumps.

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