US2018096903A1PendingUtilityA1

Fan-out panel level package and method of fabricating the same

Assignee: SAMSUNG ELECTRONICS CO LTDPriority: Apr 26, 2016Filed: Dec 6, 2017Published: Apr 5, 2018
Est. expiryApr 26, 2036(~9.7 yrs left)· nominal 20-yr term from priority
H10P 72/7424H10P 14/69433H10P 14/69215H10P 14/6334H10P 76/2041H10P 74/23H10P 72/0606H10P 72/74H10P 50/73H10W 74/019H10W 72/9413H10W 72/248H10W 72/244H10W 72/241H10W 72/0198H10W 70/682H10W 74/117H10W 74/016H10W 74/014H10W 72/90H10W 72/012H10W 70/09H10W 70/05H10W 20/0698H10W 20/081H10P 74/203H01L 21/31144H01L 2924/15153H01L 2924/1434H01L 21/67259H01L 21/02271H01L 21/565H01L 24/11H01L 24/06H01L 21/02164H01L 2224/13024H01L 21/6835H01L 2224/14131H01L 22/12H01L 21/0274H01L 2221/68345H01L 2224/02311H01L 21/0217H01L 2924/1433H01L 2924/15747H01L 21/4846H01L 21/76802H01L 21/76895H01L 2924/152H10W 70/655G03F 7/20
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Claims

Abstract

A method of fabricating a package includes providing a mold substrate supporting dies in cavities of a fan-out substrate, detecting positions of the dies with respect to the fan-out substrate, and forming interconnection lines. At least one of the interconnection lines includes a first portion extending from the fan-out substrate to a target position on the cavity disposed between the fan-out substrate and one of the dies the one of the dies disposed at a detected position different from the target position, and a second portion extending from the one die to the fan-out substrate.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A package comprising:
 a mold substrate;   a fan-out substrate disposed on the mold substrate, the fan-out substrate having a cavity;   a die disposed on the mold substrate in the cavity; and   interconnection lines disposed on the cavity between the fan-out substrate and the die, the interconnection lines connecting the die to the fan-out substrate, each of the interconnection lines includes,
 a first portion extending from the fan-out substrate to the die in a first direction, and 
 a second portion connected to the first portion, the second portion extending from the die to the fan-out substrate in a second direction different from the first direction. 
   
     
     
         2 . The package of  claim 1 , wherein the first portion and the second portion each have a first longitudinal axis and a second longitudinal axis intersecting each other on the die. 
     
     
         3 . The package of  claim 1 , wherein the fan-out substrate includes substrate electrodes connected to the first portions. 
     
     
         4 . The package of  claim 1 , wherein the die includes pad electrodes connected to the second portions. 
     
     
         5 . The package of  claim 1 , further comprising:
 an interlayer insulating layer disposed between the mold substrate and the interconnection lines, the interlayer insulating layer having contacts connecting the first and second portions of the interconnection lines to the fan-out substrate and the die, respectively.

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