Photoelectric conversion element, and method and apparatus for manufacturing the same

Abstract

A photoelectric conversion element according to an embodiment includes: a first electrode; a second electrode; and a photoelectric conversion layer that is in contact with the first electrode and the second electrode and includes an active layer containing a perovskite compound. The active layer gives an X-ray diffraction pattern having a first diffraction peak ascribed to the (004) plane of the perovskite compound and a second diffraction peak ascribed to the (220) plane of the perovskite compound. The ratio of the maximum intensity of the first diffraction peak to the maximum intensity of the second diffraction peak is 0.18 or more.

What is claimed is: 
     
         1 . A photoelectric conversion element comprising:
 a first electrode;   a second electrode; and   a photoelectric conversion layer that is in contact with the first electrode and the second electrode and includes an active layer containing a perovskite compound, wherein   the active layer gives an X-ray diffraction pattern having a first diffraction peak ascribed to the (004) plane of the perovskite compound and a second diffraction peak ascribed to the (220) plane of the perovskite compound, and the ratio of the maximum intensity of the first diffraction peak to the maximum intensity of the second diffraction peak is 0.18 or more.   
     
     
         2 . The photoelectric conversion element according to  claim 1 ,
 wherein the perovskite compound is expressed by a general formula of ABX 3 ,   the A denotes a primary ammonium ion,   the B denotes a divalent metal ion, and   the X denotes a halogen ion.   
     
     
         3 . The photoelectric conversion element according to  claim 1 ,
 wherein the photoelectric conversion layer further includes an intermediate layer provided between the first electrode and the active layer, and   the intermediate layer contains an organic material.   
     
     
         4 . The photoelectric conversion element according to  claim 3 ,
 wherein the intermediate layer contains polyethylenedioxythiophene.   
     
     
         5 . The photoelectric conversion element according to  claim 3 ,
 wherein the intermediate layer contains polyethylenedioxythiophene and polystyrene sulfonic acid.   
     
     
         6 . The photoelectric conversion element according to  claim 1 ,
 wherein the photoelectric conversion layer further includes a second intermediate layer provided between the second electrode and the active layer.   
     
     
         7 . A method of manufacturing a photoelectric conversion element,
 the photoelectric conversion element, comprising:
 a first electrode; 
 a second electrode; and 
 a photoelectric conversion layer that is in contact with the first electrode and the second electrode and includes an active layer containing a perovskite compound, 
   the method comprising:
 polishing a surface of a treatment object containing the perovskite compound; and 
 heat-treating the polished treatment object. 
   
     
     
         8 . The method of manufacturing the photoelectric conversion element according to  claim 7 , further comprising:
 before the polishing, applying a coating solution containing a precursor of the perovskite compound to the surface of the treatment object and forming a coating layer; and   between the forming the coating layer and the polishing, blowing a gas onto the coating layer and forming the perovskite compound.   
     
     
         9 . The method of manufacturing the photoelectric conversion element according to  claim 8 ,
 wherein a concentration of the precursor in the coating solution is 1770 mg/ml or less.   
     
     
         10 . The method of manufacturing the photoelectric conversion element according to  claim 8 , further comprising
 before forming the coating layer, forming an intermediate layer on the treatment object.   
     
     
         11 . The method of manufacturing the photoelectric conversion element according to  claim 8 , further comprising:
 between the forming the perovskite compound and the polishing, forming a second intermediate layer on the coating layer.   
     
     
         12 . An apparatus for manufacturing a photoelectric conversion element,
 the photoelectric conversion element: comprising:
 a first electrode; 
 a second electrode; and 
 a photoelectric conversion layer that is in contact with the first electrode and the second electrode and includes an active layer containing a perovskite compound, 
   the apparatus comprising:
 a support including a support surface to support a treatment object containing the perovskite compound; 
 a polishing roller including a rotation shaft and a polishing surface to be rotated about the rotation shaft and polish a surface of the treatment object; and 
 a mover that moves at least one of the polishing roller and the treatment object so as to make the surface of the treatment object come into contact with the polishing surface parallel to the rotation shaft. 
   
     
     
         13 . The apparatus for manufacturing the photoelectric conversion element according to  claim 12 , further comprising:
 a coater that applies a coating solution containing a precursor of the perovskite compound to the surface of the treatment object and forms a coating layer; and   a gas supply that blows a gas onto the coating layer and forms the perovskite compound.   
     
     
         14 . The apparatus for manufacturing the photoelectric conversion element according to  claim 12 , wherein
 the mover includes a second support including a second rotation shaft parallel to the rotation shaft and a second support surface to support the treatment object, and rotates the second support at a rotation speed slower than that of the polishing roller and moves the treatment object.