Flow-down determination method, flow-down determination apparatus and discharge apparatus

Abstract

Imaging is performed such that a flow-down path of the liquid from the nozzle arranged above a work to an upper surface of the work is included in an imaging field of view (Step S401). A total value of pixel values of pixels belonging to each pixel column composed of the pixels arranged in a line along a flow-down direction of the liquid in an evaluation region corresponding to the flow-down path out of an imaged image is calculated (Step S402-S403). Based on a change mode of the total value in an orthogonal direction orthogonal to the flow-down direction, presence or absence of the flow-down of the liquid is determined (Step S405-S407).

What is claimed is: 
     
         1 . A flow-down determination apparatus for determining a flow-down state of liquid from a nozzle, comprising:
 an imager which performs imaging such that a flow-down path of the liquid from the nozzle arranged above a work to an upper surface of the work is included in an imaging field of view,   a calculator which calculates a total value of pixel values of pixels belonging to each pixel column composed of the pixels arranged in a line along a flow-down direction of the liquid in a region corresponding to the flow-down path out of an imaged image, and   a determiner which determines presence or absence of the flow-down of the liquid based on a change mode of the total value in an orthogonal direction orthogonal to the flow-down direction.   
     
     
         2 . The flow-down determination apparatus of  claim 1 , further comprising an illuminator which emits an illumination light and irradiates the flow-down path with the illumination light, and wherein
 an emission direction of the illumination light from the illuminator is set to include a part of the liquid illuminated with the illumination light in an imaging field of view when the liquid flows down from the nozzle.   
     
     
         3 . The flow-down determination apparatus of  claim 1 , wherein
 the imager images an image in which a plurality of pixels are arranged in a matrix along two directions which are mutually orthogonal, and   one of the two directions is matched with the flow-down direction.   
     
     
         4 . A discharge apparatus, comprising:
 a holder which holds a work;   a nozzle which discharges liquid from above the work;   an imager which performs imaging such that a flow-down path of the liquid from the nozzle arranged above the work to an upper surface of the work is included in an imaging field of view;   a calculator which calculates a total value of pixel values of pixels belonging to each pixel column composed of the pixels arranged in a line along a flow-down direction of the liquid in a region corresponding to the flow-down path out of an imaged image, and   a determiner which determines presence or absence of the flow-down of the liquid based on a change mode of the total value in an orthogonal direction orthogonal to the flow-down direction.   
     
     
         5 . The discharge apparatus of  claim 4 , wherein the nozzle is configured to be movable above the work. 
     
     
         6 . The discharge apparatus of  claim 5 , further comprising a controller which controls the discharge of the liquid from the nozzle, and wherein
 the controller determines an abnormality of the nozzle based on a determination result of the determiner.