Charge stripping film for ion beam

Abstract

A charge stripping film for an ion beam includes a single layer body of a graphitic film having a carbon component of at least 96 at % and a thermal conductivity in a film surface direction at 25° C. of at least 800 W/mK, or a laminated body of the graphitic film. The charge stripping film has a thickness of 100 nm to 10 μm, a tensile strength in a film surface direction of at least 5 MPa, a coefficient of thermal expansion in the film surface direction of at least 1×10 −5 /K, and an area of at least 4 cm 2 .

What is claimed is: 
     
         1 . A charge stripping film for an ion beam, comprising:
 a single layer body of a graphitic film having a carbon component of at least 96 at % and a thermal conductivity in a film surface direction at 25° C. of at least 800 W/mK; or a laminated body of the graphitic film, wherein   the charge stripping film has a thickness of 100 nm to 10 μm, a tensile strength in a film surface direction of at least 5 MPa, a coefficient of thermal expansion in the film surface direction of at least 1×10 −5 /K, and an area of at least 4 cm 2 .   
     
     
         2 . A charge stripping film for an ion beam of negative hydrogen, hydrogen or carbon, comprising:
 a single layer body of a graphitic film having a carbon component of at least 98 at % and a thermal conductivity in a film surface direction at 25° C. of at least 1000 W/mK; or a laminated body of the graphitic film, wherein   the charge stripping film has a thickness of 100 nm to 5 m, a tensile strength in a film surface direction of at least 5 MPa, a coefficient of thermal expansion in the film surface direction of at least 1×10 −5 /K, and an area of at least 4 cm 2 .   
     
     
         3 . The charge stripping film according to  claim 1 ,
 wherein the charge stripping film is obtained by heat-treating a polymer film at a temperature of at least 2400° C. in an inert gas atmosphere, and   wherein the polymer film comprises at least one selected from the group consisting of polyamide, polyimide, polyquinoxaline, polyparaphenylene, polyoxadiazole, polybenzimidazole, polybenzoxazole, polybenzothiazole, polyquinazolinedione, polybenzoxazinone, polyquinazolone, benzimidazobenzophenanthroline ladder polymer, and derivatives thereof.   
     
     
         4 . The charge stripping film according to  claim 3 , wherein the polymer film comprises aromatic polyimide. 
     
     
         5 . The charge stripping film for an ion beam according to  claim 1 , wherein the tensile strength is at least 20 MPa. 
     
     
         6 . The charge stripping film according to  claim 1 , wherein the charge stripping film is obtained by heat-treating a polymer film at a temperature of at least 2800° C. in an inert gas atmosphere. 
     
     
         7 . The charge stripping film according to  claim 3 , wherein the polymer film has a thickness of 200 nm to 25 μm. 
     
     
         8 . The charge stripping film according to  claim 2 , wherein the tensile strength is at least 20 MPa. 
     
     
         9 . The charge stripping film for an ion beam according to  claim 2 ,
 wherein the charge stripping film is obtained by heat-treating a polymer film at a temperature of at least 2400° C. in an inert gas atmosphere, and   wherein the polymer film comprises at least one selected from the group consisting of polyamide, polyimide, polyquinoxaline, polyparaphenylene, polyoxadiazole, polybenzimidazole, polybenzoxazole, polybenzothiazole, polyquinazolinedione, polybenzoxazinone, polyquinazolone, benzimidazobenzophenanthroline ladder polymer, and derivatives thereof.   
     
     
         10 . The charge stripping film according to  claim 2 , wherein the charge stripping film is obtained by heat-treating a polymer film at a temperature of at least 2800° C. in an inert gas atmosphere. 
     
     
         11 . The charge stripping film according to  claim 9 , wherein the polymer film has a thickness of at least 200 nm to 25 μm. 
     
     
         12 . The charge stripping film according to  claim 9 , wherein the polymer film comprises aromatic polyimide.