US2018045862A1PendingUtilityA1
Systems for tunable nanocube plasmonic resonators and methods for forming
Est. expiryApr 6, 2036(~9.7 yrs left)· nominal 20-yr term from priority
Inventors:Jesse R. Cheatham, IiiTom DriscollRoderick A. HydeMuriel Y. IshikawaJordin T. KareNathan P. MyhrvoldTony S. PanRobert C. PetroskiDavid R. SmithClarence T. TegreeneNicholas W. TouranYaroslav A. UrzhumovCharles WhitmerLowell L. Wood, Jr.Victoria Y.H. Wood
G02F 2001/0155G02B 6/1226G02B 5/008B82Y 20/00G02F 2203/10G01N 21/554H01L 31/06G02F 1/015G01N 21/648G02F 2203/15H10F 10/10G02F 1/0155
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Claims
Abstract
The present disclosure is directed to systems for tuning nanocube plasmonic resonators and methods for forming tunable plasmonic resonators. A tunable plasmonic resonator system can include a substrate and a nanostructure positioned on a surface of the substrate. The substrate can include a semiconductor material having a carrier density distribution. A junction can be formed between the nanostructure and the substrate forming a Schottky junction. Changing the carrier density distribution of the semiconductor material can change a plasmonic response of the plasmonic resonator.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A tunable plasmonic resonator system, comprising:
a substrate, wherein the substrate includes a semiconductor material having a carrier density distribution; an array of plasmonic resonators comprising an array of nanostructures coupled to the substrate; and a dielectric layer positioned between the substrate and the array of nanostructures; wherein a plasmonic response of at least one plasmonic resonator is variable by varying the carrier density of the dielectric layer.
2 . The system of claim 1 , wherein the semiconductor material includes one of silicon, germanium, gallium arsenide, indium gallium arsenide, gallium phosphide, or indium phosphide.
3 . The system of claim 1 , further comprising a voltage source, wherein the voltage source is configured to provide a voltage between the substrate and the array of nanostructures.
4 . The system of claim 3 , wherein the voltage source includes a pair of electrodes positioned adjacent to the substrate.
5 . The system of claim 1 , wherein the properties of the dielectric layer are adjustable by varying the voltage applied between the array of nanostructures and the substrate.
6 . The system of claim 1 , wherein a thickness of the dielectric layer is adjustable by varying the voltage applied between the array of nanostructures and the substrate.
7 . The system of claim 1 , wherein the plasmonic response of at least one plasmonic resonator corresponds to a response to an incident light.
8 . The system of claim 1 , wherein varying the carrier density distribution changes an absorption spectrum of at least one nanostructure.
9 . The system of claim 1 , wherein varying the carrier density distribution changes a resonance wavelength of at least one nanostructure.
10 . The system of claim 1 , wherein varying the carrier density distribution modifies a reflectance spectrum of at least one nanostructure.
11 . The system of claim 1 , wherein the array of nanostructures is embedded in a fluid matrix or a solid matrix on the surface of the substrate.
12 . The system of claim 1 , wherein the array of nanostructures includes at least one of aluminum, silver, or gold.
13 . The system of claim 1 , wherein at least one nanostructure in the array of nanostructures is a nanocube.
14 . A method for forming an array of tunable plasmonic resonators, comprising:
forming a dielectric layer on a substrate, wherein the substrate includes a semiconductor material having a carrier density distribution; forming an array of plasmonic resonators by depositing an array of nanostructures on the dielectric layer; applying a voltage between the array of nanostructures and the substrate; and controlling the carrier density distribution to tune a plasmonic response of at least one plasmonic resonator.
15 . The method of claim 14 , wherein the substrate is a metal-oxide-semiconductor device including a gate structure.
16 . The method of claim 14 , further comprising generating a magnetic field using a pair of electrodes positioned adjacent to the substrate.
17 . The method of claim 14 , further comprising varying the voltage applied between the array of nanostructures and the substrate to adjust the properties of the dielectric layer.
18 . The method of claim 14 , further comprising varying the voltage applied between the array of nanostructures and the substrate to adjust the thickness of the dielectric layer.
19 . The method of claim 14 , wherein the plasmonic response of at least one plasmonic resonator corresponds to a response to an incident light.
20 . The method of claim 14 , further comprising tuning an absorption spectrum of at least one nanostructure by controlling the carrier density distribution.Join the waitlist — get patent alerts
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