Separating method of fluorine-containing solvent, removing method of fluorine-containing solvent contaminant, and apparatus therefore

Abstract

An object of the invention is to separate a fluorine-containing solvent in a short time and efficiently from a fluorine-containing solvent which contains alcohol. There is provided a method for separating a fluorine-containing solvent by filtering a mixed liquid composition containing the fluorine-containing solvent, alcohol and water with a membrane containing fluorine resin.

1 . A method for separating a fluorine-containing solvent comprising filtering a two-phase mixed liquid composition containing the fluorine-containing solvent, alcohol and water with a membrane containing a fluorine resin. 
     
     
         2 . A method for removing an alcohol-containing contaminant from a fluorine-containing solvent, the method comprising:
 adding and mixing water into the fluorine-containing solvent containing the alcohol-containing contaminant to prepare a two-phase mixed liquid composition containing the fluorine-containing solvent, the alcohol, and the water; and thereafter   separating the fluorine-containing solvent by filtering the two-phase mixed liquid composition with a membrane containing fluorine resin.   
     
     
         3 . The method according to  claim 1  or  2 , wherein the fluorine-containing solvent is a hydrofluorocarbon or a hydrofluoroether. 
     
     
         4 . A filtration separation apparatus for performing the method according to any one of  claims 1  to  3 , the filtration separation apparatus comprising a membrane containing fluorine resin. 
     
     
         5 . A cleaned fluorine-containing solvent that is obtained by the method according to any one of  claims 1  to  3 . 
     
     
         6 . The fluorine-containing solvent according to  claim 5 , wherein the fluorine-containing solvent is for semiconductor cleaning.