Semiconductor system

Abstract

A semiconductor system shares information on a semiconductor manufacturing apparatus between first and second semiconductor manufacturing apparatuses through direct communication. The first semiconductor manufacturing apparatus includes a first acquisition unit acquiring first information on the first semiconductor manufacturing apparatus, a first storage unit storing the acquired first information, and a first communication unit sending the stored first information to the second semiconductor manufacturing apparatus. The second semiconductor manufacturing apparatus includes a second acquisition unit acquiring second information on the second semiconductor manufacturing apparatus, a second storage unit storing the acquired second information, a second communication unit receiving the first information sent from the first semiconductor manufacturing apparatus, an analysis unit analyzing a state of the second semiconductor manufacturing apparatus based on the received first information and the stored second information, an information generation unit generating information visualizing an analysis result, and a display unit displaying the generated information.

What is claimed is: 
     
         1 . A semiconductor system comprising:
 a first semiconductor manufacturing apparatus and a second semiconductor manufacturing apparatus that share information on a semiconductor manufacturing apparatus by directly communicating the information therebetween,   wherein the first semiconductor manufacturing apparatus includes:   a first acquisition unit configured to acquire first information on the first semiconductor manufacturing apparatus;   a first storage unit configured to store the first information acquired by the first acquisition unit; and   a first communication unit configured to send the first information stored in the first storage unit to the second semiconductor manufacturing apparatus, and   the second semiconductor manufacturing apparatus includes:   a second acquisition unit configured to acquire second information on the second semiconductor manufacturing apparatus;   a second storage unit configured to store the second information acquired by the second acquisition unit;   a second communication unit configured to receive the first information sent from the first semiconductor manufacturing apparatus;   an analysis unit configured to analyze a state of the second semiconductor manufacturing apparatus based on the first information received by the second communication unit and the second information stored in the second storage unit;   an information generation unit configured to generate information that visualizes an analysis result of the analysis unit; and   a display unit configured to display information generated by the information generation unit.   
     
     
         2 . The semiconductor system of  claim 1 , wherein the analysis unit compares the second information acquired by the second acquisition unit with the first information received by the second communication unit to determine whether the state of the second semiconductor manufacturing apparatus is identical to a state of the first semiconductor manufacturing apparatus. 
     
     
         3 . The semiconductor system of  claim 1 , wherein, when a difference between the first information and the second information when the first semiconductor manufacturing apparatus and the second semiconductor manufacturing apparatus are caused to perform a same operation is included in a predetermined range, the analysis unit determines that the state of the second semiconductor manufacturing apparatus is identical to the state of the first semiconductor manufacturing apparatus, and
 when the difference between the first information and the second information when the first semiconductor manufacturing apparatus and the second semiconductor manufacturing apparatus are caused to perform the same operation is not included in the predetermined range, the analysis unit determines that the state of the second semiconductor manufacturing apparatus is different from the state of the first semiconductor manufacturing apparatus.   
     
     
         4 . The semiconductor system of  claim 2 , wherein, when the analysis unit determines that the state of the second semiconductor manufacturing apparatus is different from the state of the first semiconductor manufacturing apparatus, the information generation unit generates a correction value for matching a characteristic of a semiconductor device manufactured by the second semiconductor manufacturing apparatus with a characteristic of a semiconductor device manufactured by the first semiconductor manufacturing apparatus. 
     
     
         5 . The semiconductor system of  claim 1 , wherein the first information and the second information are set values to be used when controlling operations of respective units of the first semiconductor manufacturing apparatus and the second semiconductor manufacturing apparatus. 
     
     
         6 . The semiconductor system of  claim 1 , wherein the first information and the second information are state logs of respective units of the first semiconductor manufacturing apparatus and the second semiconductor manufacturing apparatus when a predetermined operation is executed in the first semiconductor manufacturing apparatus and the second semiconductor manufacturing apparatus. 
     
     
         7 . The semiconductor system of  claim 1 , wherein the first information and the second information are values that vary depending on an environment in which each of the first semiconductor manufacturing apparatus and the second semiconductor manufacturing apparatus is installed.