Method of preparing tungsten metal material and tungsten target with high purity

Abstract

A method of preparing a tungsten metal material with high purity, comprising the steps of (A) providing a tungsten metal powder to mix with a metal nitrate to form a mixed powder slurry; (B) ball-grinding the mixed powder slurry to obtain a uniformly mixed powder; (C) sintering the uniformly mixed powder to obtain the tungsten metal material with high purity. Accordingly, the tungsten metal material with purity more than 99.9% can be prepared, so as to prepare the tungsten metal target.

What is claimed is: 
     
         1 . A method of preparing a tungsten metal material with high purity, comprising the steps of:
 (A) providing a tungsten metal powder to mix with a metal nitrate to form a mixed powder slurry;   (B) ball-grinding the mixed powder slurry to obtain a uniformly mixed powder;   (C) sintering the uniformly mixed powder to obtain the tungsten metal material with high purity.   
     
     
         2 . The method of preparing a tungsten metal material with high purity as claimed in  claim 1 , wherein the purity of the tungsten metal material with high purity is more than 99.9%, and the density thereof is more than 99% of the density of pure tungsten. 
     
     
         3 . The method of preparing a tungsten metal material with high purity as claimed in  claim 2 , wherein the tungsten metal material with high purity is used to prepare a tungsten metal target. 
     
     
         4 . The method of preparing a tungsten metal material with high purity as claimed in  claim 3 , wherein before the sintering step (C), the uniformly mixed powder is further pressed and shaped to a desired shape. 
     
     
         5 . The method of preparing a tungsten metal material with high purity as claimed in  claim 1 , wherein the metal nitrate is selected from nickel nitrate, ferric nitrate, and a mixture thereof. 
     
     
         6 . The method of preparing a tungsten metal material with high purity as claimed in  claim 1 , wherein a solvent is added to the mixed powder slurry in the ball-grinding step (B), and the solvent is oleic acid. 
     
     
         7 . The method of preparing a tungsten metal material with high purity as claimed in  claim 1 , wherein the sintering treatment include a plurality of stages of heating treatments. 
     
     
         8 . The method of preparing a tungsten metal material with high purity as claimed in  claim 7 , wherein the temperature in the first stage of heating treatments of the sintering treatment is more than 200° C. 
     
     
         9 . The method of preparing a tungsten metal material with high purity as claimed in  claim 7 , wherein the temperature in the last stage of heating treatments of the sintering treatment is more than 1400° C. 
     
     
         10 . The method of preparing a tungsten metal material with high purity as claimed in  claim 1 , wherein after the ball-grinding step (B), a heating/drying process and a filtering process are further performed.