US2018016183A1PendingUtilityA1

Dimensionally stable fast etching glasses

Assignee: CORNING INCPriority: Oct 31, 2014Filed: Sep 27, 2017Published: Jan 18, 2018
Est. expiryOct 31, 2034(~8.3 yrs left)· nominal 20-yr term from priority
C03C 3/091C03C 3/093C03C 3/087Y02P40/57G02F 1/133302C03C 4/00C03B 17/064C03C 3/085
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Claims

Abstract

Substantially alkali free glasses are disclosed with can be used to produce substrates for flat panel display devices, e.g., active-matrix liquid crystal displays (AMLCDs). The glasses have high annealing temperatures and etch rates. Methods for producing substantially alkali free glasses using a downdraw process (e.g., a fusion process) are also disclosed.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A glass comprising:
 an annealing temperature greater than or equal to about 785° C.;   a Young's modulus greater than or equal to about 81 GPa;   a T 200P  less than or equal to about 1750° C.;   a T 35kP  less than or equal to about 1340° C.;   an average surface roughness as measured by atomic force microscopy of less than 0.5 nm; and   wherein the glass comprises in mole percent on an oxide basis less than or equal to 2.0 mole percent of the individual concentration of TiO 2 , MnO, Fe 2 O 3 , ZnO, Nb 2 O 5 , MoO 3 , Ta 2 O 5 , WO 3 , Y 2 O 3 , La 2 O 3 , CeO 2 , ZrO 2 , HfO 2 , In 2 O 3 , Ga 2 O 3 , Bi 2 O 3 , GeO 2 , PbO, SeO 3 , TeO 2 , and Gd 2 O 3 .   
     
     
         2 . The glass of  claim 1 , wherein the glass comprises greater than zero but less than or equal to 5.0 mole percent of the combined concentration of TiO 2 , MnO, Fe 2 O 3 , ZnO, Nb 2 O 5 , MoO 3 , Ta 2 O 5 , WO 3 , Y 2 O 3 , La 2 O 3  and CeO 2 . 
     
     
         3 . The glass of  claim 1 , wherein the density is less than or equal to about 2.7 g/cc and the specific modulus is less than about 34. 
     
     
         4 . The glass of  claim 3 , wherein the specific modulus is between 30 and 34. 
     
     
         5 . The glass of  claim 2 , wherein (MgO+CaO+SrO+BaO)/Al 2 O 3  is in the range of about 1.0 and 1.6. 
     
     
         6 . The glass of  claim 1 , wherein the T 200P  less than or equal to about 700° C. 
     
     
         7 . The glass of  claim 1 , wherein the T 35kP  less than or equal to about 1310° C. 
     
     
         8 . The glass of  claim 1 , wherein the glass is substantially free of alkalis. 
     
     
         9 . A liquid crystal display substrate comprising the glass of  claim 1 . 
     
     
         10 . A glass comprising in mole percent on an oxide basis:
 SiO 2  60-80;   Al 2 O 3  5-20;   B 2 O 3  0-10;   MgO 0-20;   CaO 0-20;   SrO 0-20;   BaO 0-20;   ZnO 0-20; and   wherein the glass comprises in mole percent on an oxide basis less than or equal to 2.0 mole percent of the individual concentration of TiO 2 , MnO, Fe 2 O 3 , ZnO, Nb 2 O 5 , MoO 3 , Ta 2 O 5 , WO 3 , Y 2 O 3 , La 2 O 3 , CeO 2 , ZrO 7 , HfO 2 , In 2 O 3 , Ga 2 O 3 , Bi 2 O 3 , GeO 2 , PbO, SeO 3 , TeO 2 , and Gd 2 O 3 .   
     
     
         11 . The glass of  claim 10 , wherein the glass comprises greater than zero but less than or equal to 5.0 mole percent of the combined concentration of TiO 2 , MnO, Fe 2 O 3 , ZnO, Nb 2 O 5 , MoO 3 , Ta 2 O 5 , WO 3 , Y 2 O 3 , La 2 O 3  and CeO 2 . 
     
     
         12 . The glass of  claim 10 , wherein the density is less than or equal to about 2.7 g/cc and the specific modulus is less than about 34. 
     
     
         13 . The glass of  claim 10 , wherein the specific modulus is between 30 and 34. 
     
     
         14 . The glass of  claim 10 , wherein (MgO+CaO+SrO+BaO)/Al 2 O 3  is in the range of about 1.0 and 1.6. 
     
     
         15 . The glass of  claim 10 , wherein the T 200P  less than or equal to about 1700° C. 
     
     
         16 . The glass of  claim 10 , wherein the T 35kP  less than or equal to about 1310° C. 
     
     
         17 . The glass of  claim 10 , wherein (MgO+CaO+SrO+BaO)/Al 2 O 3  is in the range of about 1.0 and 1.6, T(ann)>785° C., density <2.7 g/cc, T(200P)<1750° C., T(35 kP)<1340° C., Young's modulus >81 GPa. 
     
     
         18 . The glass of  claim 10 , wherein the glass is substantially free of alkalis. 
     
     
         19 . A liquid crystal display substrate comprising the glass of  claim 10 .

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