Thermal coupled quartz dome heat sink

Abstract

Embodiments described herein generally relate to apparatus for processing substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps are positioned to provide radiant energy through an optically transparent window to a substrate positioned on the substrate support. The plurality of lamps are positioned in a lamp housing. A cooling channel is formed in the lamp housing. A surface of the lamp housing is spaced a distance from the optically transparent window to form a gap therebetween. The gap functions as a fluid channel and is adapted to contain a fluid therein to facilitate cooling of the optically transparent window. Turbulence inducing features, such as openings, formed in the surface of the lamp housing induce a turbulent flow of the cooling fluid, thus improving heat transfer between the optically transparent window and the lamp housing.

What is claimed is: 
     
         1 . A process chamber, comprising:
 a chamber body including an optically transparent window;   a lamp housing disposed adjacent to the optically transparent window and forming a gap therebetween, the lamp housing having an upper surface comprising turbulence-inducing features;   a plurality of lamps disposed within the lamp housing;   one or more cooling channels disposed within the lamp housing; and   a temperature control unit adapted to provide a cooling fluid to the gap between the optically transparent dome and the lamp housing.   
     
     
         2 . The process chamber of  claim 1 , wherein the turbulence-inducing features include openings formed through the upper surface of the lamp housing. 
     
     
         3 . The process chamber of  claim 1 , wherein the turbulence-inducing features include one or more channels formed in the upper surface of the lamp housing. 
     
     
         4 . The process chamber of  claim 1 , wherein the turbulence-inducing features include extended portions of a reflector extending above the upper surface of the lamp housing. 
     
     
         5 . The process chamber of  claim 1 , wherein the lamp housing comprises copper or aluminum. 
     
     
         6 . The process chamber of  claim 1 , wherein the temperature control unit includes a heat exchanger. 
     
     
         7 . The process chamber of  claim 1 , wherein the temperature control unit includes a forced induction unit. 
     
     
         8 . The process chamber of  claim 1 , wherein the optically transparent window is a lower dome. 
     
     
         9 . The process chamber of  claim 1 , wherein the optically transparent dome comprises quartz. 
     
     
         10 . A method of cooling, comprising:
 circulating a cooling fluid to within a space between an optically transparent window and a lamp housing having at least one cooling channel formed therein, wherein a surface of the lamp housing includes one or more turbulence inducing features to cause a turbulent flow of the cooling fluid, and wherein the cooling fluid thermally couples the optically transparent window and the at least one cooling channel.   
     
     
         11 . The method of  claim 10 , wherein the cooling fluid comprises atmospheric air. 
     
     
         12 . The method of  claim 10 , wherein the cooling fluid comprises one or more of nitrogen, helium, or hydrogen. 
     
     
         13 . The method of  claim 10 , wherein the cooling fluid is a liquid. 
     
     
         14 . The method of  claim 10 , wherein a size of the space between the optically transparent window and the lamp housing is selected to generate localized recirculation of the cooling fluid. 
     
     
         15 . The method of  claim 10 , wherein forced induction facilitates flow of the cooling fluid between the optically transparent window and the lamp housing. 
     
     
         16 . The method of  claim 10 , further comprising circulating the cooling fluid through a heat exchanger. 
     
     
         17 . A process chamber, comprising:
 a chamber body including an optically transparent window;   a lamp housing disposed adjacent to the optically transparent window and forming a gap between the lamp housing and the optically transparent window, the lamp housing having an upper surface comprising turbulence-inducing features selected from the group consisting of:
 openings formed through an upper surface of the lamp housing; 
 one or more channels formed in an upper surface of the lamp housing; and 
 extended portions of a reflector extending above the upper surface of the lamp housing; 
   a plurality of lamps disposed within the lamp housing;   one or more cooling channels disposed within the lamp housing; and   a temperature control unit adapted to provide a cooling fluid to the gap between the optically transparent dome and the lamp housing.   
     
     
         18 . The process chamber of  claim 17 , wherein the temperature control unit includes a heat exchanger. 
     
     
         19 . The process chamber of  claim 18 , wherein the temperature control unit includes a forced induction unit. 
     
     
         20 . The process chamber of  claim 19 , wherein the optically transparent window is a lower dome.