Susceptor

Abstract

A susceptor is provided. The susceptor comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring, wherein the outer ring comprises multiple sub-elements separated from each other and detachably connected to the base part; wherein the inner ring and the outer ring separate the holders from one another, and the inner ring comprises multiple first extensions each protruding outwardly toward the outer ring, and each sub-element comprises a second extension extending inwardly toward the inner ring.

What is claimed is: 
     
         1 . A susceptor, comprising:
 a base part;   multiple holders distributed on the base part for accommodating wafers;   an inner ring connected to the base part; and   an outer ring detachably connected to the base part and separated from the inner ring, wherein the outer ring comprises multiple sub-elements separated from each other and detachably connected to the base part;   wherein the inner ring and the outer ring separate the holders from one another, and the inner ring comprises multiple first extensions each protruding outwardly toward the outer ring, and each sub-element comprises a second extension extending inwardly toward the inner ring.   
     
     
         2 . The susceptor according to  claim 1 , wherein the base part comprises a first positioning structure, and each sub-element comprises a first surface facing the base part, a second surface opposite to the first surface and a second positioning structure formed on the first surface and associated with the first positioning structure. 
     
     
         3 . The susceptor according to  claim 3 , wherein the first positioning structure comprises a protrusion, and the second positioning structure comprises a recess formed in the first surface and is engaged with the protrusion. 
     
     
         4 . The susceptor according to  claim 3 , wherein a depth of the recess is smaller than a distance between the first surface and the second surface. 
     
     
         5 . The susceptor according to  claim 1 , wherein one of the sub-elements has a maximum width, the second extension of the sub-element has the maximum width, the inner ring has a maximum width, and one of the first extensions has the maximum width of the inner ring, and the second extension having the maximum width of the sub-element aligns with the first extension having the maximum width of the inner ring. 
     
     
         6 . The susceptor according to  claim 1 , wherein each second extension aligns with one of the first extensions respectively. 
     
     
         7 . The susceptor according to  claim 1 , wherein the inner ring is detachably connected to the base part. 
     
     
         8 . The susceptor according to  claim 1 , wherein the base part has a radial width, and each sub-element has a maximum width, and the maximum width of each sub-element is not greater than a half of the radial width of the base part. 
     
     
         9 . The susceptor according to  claim 1 , wherein each sub-element neighbors two holders. 
     
     
         10 . The susceptor according to  claim 1 , wherein one of the sub-elements comprises multiple second extensions extending inwardly toward the inner ring. 
     
     
         11 . The susceptor according to  claim 10 , wherein the multiple second extensions align with two of the first extensions of the inner ring. 
     
     
         12 . The susceptor according to  claim 1 , wherein each sub-element comprises a first surface facing the base part, and comprises a second surface opposite to the first surface, and the susceptor further comprises a first positioning structure; a second positioning structure formed in the first surface; and a third positioning structure formed in the base part, wherein the sub-elements connect to the base part by associating the first positioning structure with the second positioning structure and the third positioning structure. 
     
     
         13 . The susceptor according to  claim 12 , wherein the first positioning structure comprises a pin, and/or the second positioning structure comprising a first recess, and/or the third positioning structure comprising a second recess. 
     
     
         14 . The susceptor according to  claim 13 , wherein the pin comprises an upper portion associated with the first recess, and a lower portion associated with the second recess. 
     
     
         15 . The susceptor according to  claim 14 , wherein the pin further comprises a middle portion formed between the upper portion and the lower portion, and a width of the middle portion is smaller than a width of the upper portion and/or that of the lower portion. 
     
     
         16 . The susceptor according to  claim 14 , further comprising a buffer space between the lower portion and the second recess. 
     
     
         17 . The susceptor according to  claim 12 , wherein the second positioning structure comprises multiple first recesses, each of the first recesses is formed in a surface of one of the sub-elements facing the base part, wherein the third positioning structure comprises multiple second recesses, the second recesses are formed in a surface of the base part facing the sub-elements, and wherein the first positioning structure comprises multiple pins. 
     
     
         18 . The susceptor according to  claim 12 , further comprising a spacer disposed between the sub-elements and the base part. 
     
     
         19 . The susceptor according to  claim 1 , wherein each holder comprises a top surface and a rim surrounding the top surface and comprising a height, the base part comprises an upper surface carrying the inner ring and the outer ring, and one of the sub-elements comprises a thickness not greater than the height of the rim of the holder. 
     
     
         20 . The susceptor according to  claim 1 , wherein all the sub-elements do not surround the holders entirely.