US2017306495A1PendingUtilityA1

Angled lift jetting

Assignee: ORBOTECH LTDPriority: Jan 21, 2015Filed: Jul 10, 2017Published: Oct 26, 2017
Est. expiryJan 21, 2035(~8.5 yrs left)· nominal 20-yr term from priority
C23C 14/225B23K 2103/42C23C 14/048B23K 26/0648B23K 2103/00C23C 14/28B33Y 30/00B23K 26/342C23C 18/14H10K 71/18
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Claims

Abstract

An apparatus for material deposition on an acceptor surface includes a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is not parallel to the acceptor surface, and including a donor film on the second surface. The apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface, so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.

Claims

exact text as granted — not AI-modified
1 . Apparatus for material deposition on an acceptor surface, comprising:
 a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is not parallel to the acceptor surface, and comprising a donor film on the second surface; and   an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface, so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.   
     
     
         2 . The apparatus according to  claim 1 , wherein the second surface comprises a periodic structure. 
     
     
         3 . The apparatus according to  claim 1 , wherein the second surface comprises a multi-faceted structure. 
     
     
         4 . The apparatus according to  claim 3 , wherein the second surface comprises first and second facets oriented at opposing angles and coated with different respective donor films. 
     
     
         5 . The apparatus according to  claim 3 , wherein the second surface comprises first and second facets and wherein only the first facet is coated with the donor film. 
     
     
         6 . Apparatus for material deposition, comprising:
 a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is non-planar, and comprising a donor film on the non-planar part of the second surface; and   an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the non-planar part of the second surface, so as to induce ejection of droplets of molten material from the donor film onto an acceptor surface.   
     
     
         7 . The apparatus according to  claim 6 , wherein the second surface comprises a periodic structure. 
     
     
         8 . The apparatus according to  claim 6 , wherein the second surface comprises a curved structure. 
     
     
         9 . The apparatus according to  claim 6 , wherein the second surface comprises a multi-faceted structure. 
     
     
         10 . The apparatus according to  claim 9 , wherein the second surface comprises first and second facets oriented at opposing angles and coated with different respective donor films. 
     
     
         11 . The apparatus according to  claim 9 , wherein the second surface comprises first and second facets and wherein only the first facet is coated with the donor film. 
     
     
         12 . A method for material deposition, comprising:
 providing a transparent donor substrate having opposing first and second surfaces and having first and second facets oriented at opposing angles on the second surface, and comprising a donor film on the first and second facets;   positioning the donor substrate in proximity to an acceptor substrate, with the second surface facing toward the acceptor substrate; and   directing a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location selected responsively to the first and second facets of the second surface, so as to induce ejection of droplets of molten material from the donor film on the first and second facets onto the acceptor substrate.   
     
     
         13 . The method according to  claim 12 , wherein the ejection of droplets of molten material from the donor film on the first and second facets is performed simultaneously. 
     
     
         14 . The method according to  claim 12 , wherein the ejection of droplets of molten material from the donor film on the first and second facets is performed sequentially. 
     
     
         15 . A method for material deposition, comprising:
 providing a transparent donor substrate, which has opposing first and second surfaces and has a donor film on the second surface;   positioning the donor substrate in proximity to an acceptor surface of an acceptor substrate, with the second surface facing toward the acceptor substrate and oriented at an oblique angle relative to the acceptor surface; and   directing a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film while the second surface is oriented at the oblique angle so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.   
     
     
         16 . The method according to  claim 15 , wherein positioning the donor substrate comprises identifying a three-dimensional (3D) shape of a topographical feature on the acceptor surface, and orienting the donor substrate responsively to the 3D shape. 
     
     
         17 . The method according to  claim 15 , wherein the second surface comprises a curved structure. 
     
     
         18 . The method according to  claim 15 , wherein the second surface of the donor substrate comprises a multi-faceted structure. 
     
     
         19 . The method according to  claim 18 , wherein the multi-faceted structure comprises first and second facets oriented at opposing angles and coated with the donor film. 
     
     
         20 . The method according to  claim 19 , and comprising ejecting the droplets from the donor film of the first and second facets, onto the 3D shape, simultaneously. 
     
     
         21 . The method according to  claim 19 , and comprising ejecting the droplets from the donor film of the first and second facets, onto the 3D shape, sequentially. 
     
     
         22 . The method according to  claim 15 , wherein the second surface of the donor substrate comprises a periodic structure.

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