Nanopillar electrode devices and methods of recording action potentials

Abstract

This disclosure provide a nanopillar electrode device, comprising a substrate patterned with a plurality of metal pads. The device may further comprise a plurality of nanopillars electrode arrays, wherein each nanopillar electrode array is attached to the substrate above a metal pad and electrically connected to the pad. The device may further comprise and a chamber surrounding the nanopillar electrodes, which can be used for culturing cells of interest for recording action potentials. The nanopillar electrode device may be configured to apply a voltage through the nanopillar electrodes from a voltage source. Nanopillar electroporation may be used to increase the permeability of cell membranes to allow intracellular recording. Also provided are methods of device fabrication, and methods of use.

1 .- 20 . (canceled) 
     
     
         21 . A nanopillar electrode device for measuring membrane potentials from a cell comprising:
 a substrate patterned with a plurality of metal pads, a plurality of nanopillar electrode arrays, wherein an individual nanopillar electrode array is attached to the substrate above a metal pad and electrically connected to the metal pad, and one or more nanopillar electrodes of the plurality of nanopillar electrode arrays are configured to electroporate the cell to increase permeability of a portion of cell membrane engulfing the one or more nanopillar electrodes such that intracellular signals of the cell are recorded by the one or more nanopillar electrodes in response to the electroporation; and   a chamber surrounding the nanopillar electrodes.   
     
     
         22 . The nanopillar electrode device of  claim 21 , wherein the pads are electrically insulated by a Si3N4/SiO2 layer. 
     
     
         23 . The nanopillar electrode device of  claim 21 , wherein the substrate is transparent. 
     
     
         24 . The nanopillar electrode device of  claim 32 , wherein the substrate is quartz or glass. 
     
     
         25 . The nanopillar electrode device of  claim 21 , wherein the nanopillar electrodes comprise a biocompatible metal. 
     
     
         26 . The nanopillar electrode device of  claim 25 , wherein the biocompatible metal comprises at least one of platinum, titanium, silver, or gold. 
     
     
         27 . The nanopillar electrode device of  claim 21 , wherein the metal pads comprise a biocompatible metal. 
     
     
         28 . The nanopillar electrode device of  claim 27 , wherein the biocompatible metal comprises at least one of platinum, titanium, silver, or gold. 
     
     
         29 . The nanopillar electrode device of  claim 21 , further comprising one or more recording amplifiers, wherein each recording amplifier is electrically connected to a metal pad by an electrical lead. 
     
     
         30 . The nanopillar electrode device of  claim 21 , wherein the cell is selected from the group consisting of a neuron, a muscle cell, and an endocrine cell. 
     
     
         31 . The nanopillar electrode device of  claim 21 , wherein the one or more nanopillar electrodes are configured to switch between extracellular and intracellular recording by nano-scale electroporation via the one or more nanopillar electrodes. 
     
     
         32 . The nanopillar electrode device of  claim 21 , wherein the permeability of the cell membrane is permeability of the cell membrane to ions or electrons. 
     
     
         33 . The nanopillar electrode device of  claim 32 , wherein electroporation is repeated for 20 pulses over a period of 1 second.