Actively cooled vacuum isolation valve

Abstract

A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

1 . A cooled isolation valve, comprising:
 a valve body;   a stationary element coupled to the valve body and stationary with respect to the valve body;   a movable closure element being movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position, one of the movable closure element and the stationary element comprising a sealing element, in the closed position of the movable closure element, the sealing element providing a seal between the movable closure element and the stationary element; and   a fluid channel formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element.   
     
     
         2 . The cooled isolation valve of  claim 1 , further comprising:
 a sensor for detecting whether the movable closure element is in the open position or the closed position; and   an actuator for inhibiting flow of the fluid when the sensor detects that the movable closure element is in the closed position.   
     
     
         3 . The cooled isolation valve of  claim 1 , further comprising:
 a pneumatic actuation device for controlling movement of the movable closure element; and   a bellows for isolating the pneumatic actuation device from an environment within the valve body, the bellows being disposed adjacent to the pneumatic actuation device radially from a longitudinal axis of the valve and at least partially overlapping the pneumatic actuation device along the longitudinal axis.   
     
     
         4 . The cooled isolation valve of  claim 1 , wherein the sealing element comprises an O-ring. 
     
     
         5 . The cooled isolation valve of  claim 4 , further comprising:
 a groove in one of the stationary element and the movable closure element, the O-ring being disposed in the groove, and a surface of the O-ring protruding from the groove; and   a protrusion in a surface of the other of the stationary element and the movable closure element, the protrusion contacting a portion of the protruding surface of the O-ring when the movable closure element is in the closed position, such that the O-ring is free to expand and contract.   
     
     
         6 . The cooled isolation valve of  claim 4 , further comprising:
 a groove in one of the stationary element and the movable closure element, the O-ring being disposed in the groove, and a surface of the O-ring protruding from the groove; and   a concave feature in a surface of the other of the stationary element and the movable closure element, the concave feature contacting a portion of the protruding surface of the O-ring when the movable closure element is in the closed position, such that the O-ring is free to expand and contract.   
     
     
         7 . The cooled isolation valve of  claim 1 , wherein the valve is a poppet valve. 
     
     
         8 . The cooled isolation valve of  claim 7 , wherein the movable closure element comprises a nosepiece of the poppet valve. 
     
     
         9 . The cooled isolation valve of  claim 8 , wherein the stationary element comprises a valve seat of the poppet valve. 
     
     
         10 . The cooled isolation valve of  claim 8 , wherein at least a portion of the cooling channel is formed in the nosepiece. 
     
     
         11 . The cooled isolation valve of  claim 8 , wherein the nosepiece is coupled to a movable stem of the cooled isolation valve. 
     
     
         12 . The cooled isolation valve of  claim 11 , wherein at least a portion of the cooling channel is formed in the stem. 
     
     
         13 . The cooled isolation valve of  claim 7 , wherein the sealing element comprises an O-ring in a groove, the groove being formed in a nosepiece of the poppet valve. 
     
     
         14 . The cooled isolation valve of  claim 1 , wherein:
 the valve is a gate valve; and   the movable closure element comprises a gate movable between the closed position and the open position and a shaft fixedly attached to the gate, rotation of the shaft causing movement of the gate between the open and closed positions.   
     
     
         15 . The cooled isolation valve of  claim 14 , wherein the stationary element comprises a valve seat. 
     
     
         16 . The cooled isolation valve of  claim 14 , wherein at least a portion of the cooling channel is formed in the gate. 
     
     
         17 . The cooled isolation valve of  claim 14 , wherein at least a portion of the cooling channel is formed in the shaft. 
     
     
         18 . The cooled isolation valve of  claim 14 , wherein the sealing element comprises an O-ring in a groove, the groove being formed in the gate. 
     
     
         19 . The cooled isolation valve of  claim 1 , wherein:
 the valve is a butterfly valve; and   the movable closure element comprises a flapper movable between the closed position and the open position and a shaft fixedly attached to the flapper, rotation of the shaft causing movement of the flapper between the open and closed positions.   
     
     
         20 . The cooled isolation valve of  claim 19 , wherein the stationary element comprises walls of an opening through the valve. 
     
     
         21 . The cooled isolation valve of  claim 19 , wherein at least a portion of the cooling channel is formed in the flapper. 
     
     
         22 . The cooled isolation valve of  claim 19 , wherein at least a portion of the cooling channel is formed in the shaft. 
     
     
         23 . The cooled isolation valve of  claim 1 , wherein the fluid comprises a gas. 
     
     
         24 . The cooled isolation valve of  claim 1 , wherein the fluid comprises a liquid. 
     
     
         25 . The cooled isolation valve of  claim 1 , wherein the fluid comprises air. 
     
     
         26 . The cooled isolation valve of  claim 1 , wherein the fluid comprises nitrogen (N 2 ). 
     
     
         27 . The cooled isolation valve of  claim 1 , wherein the fluid comprises water. 
     
     
         28 . The cooled isolation valve of  claim 1 , wherein the fluid comprises a heat transfer fluid. 
     
     
         29 . A method of forming a bellows for an isolation valve, comprising:
 forming a metallic bellows substrate;   configuring the metallic bellows substrate to one of a compressed state and an elongated state;   applying a first layer of a ceramic coating to the metallic bellows substrate while the metallic bellows substrate is maintained in the one of the compressed state and the elongated state;   transitioning the metallic bellows substrate to the other of the compressed state and the elongated state; and   applying a second layer of the ceramic coating while the metallic bellows substrate is maintained in the other of the compressed state and the elongated state.   
     
     
         30 . The method of  claim 29 , wherein the metallic bellows substrate is formed of stainless steel. 
     
     
         31 . The method of  claim 29 , wherein the ceramic coating comprises aluminum oxide. 
     
     
         32 . The method of  claim 29 , wherein a ratio of thickness of the metallic bellows substrate to thickness of the ceramic coating is greater than 100:1. 
     
     
         33 . A bellows for a vacuum isolation valve, comprising:
 a metallic substrate; and   a coating of ceramic material formed over the metallic substrate.   
     
     
         34 . The bellows of  claim 33 , wherein the metallic bellows substrate is formed of stainless steel. 
     
     
         35 . The bellows of  claim 33 , wherein the ceramic coating comprises aluminum oxide. 
     
     
         36 . The bellows of  claim 33 , wherein a ratio of thickness of the metallic bellows substrate to thickness of the ceramic coating is greater than 100:1.