Pattern transfer device and pattern transfer method

Abstract

According to one embodiment, a pattern transfer device includes a substrate, a transfer unit and a controller. The transfer unit is configured to have electrodes and transfer a pattern corresponding to the electrodes with a voltage applied between the substrate and the electrodes. The controller is configured to control humidity between the substrate and the transfer unit.

What is claimed is: 
     
         1 . A pattern transfer device comprising:
 a substrate;   a transfer unit having electrodes, the transfer unit being configured to transfer a pattern corresponding to the electrodes with a voltage applied between the substrate and the electrodes; and   a controller configured to control humidity between the substrate and the transfer unit.   
     
     
         2 . The pattern transfer device according to  claim 1 , wherein
 the transfer unit includes a plurality of protruding portions facing the substrate, and   the electrodes are each disposed on a sidewall of the respective protruding portions.   
     
     
         3 . The pattern transfer device according to  claim 1 , wherein the voltage is an alternating current (AC) voltage. 
     
     
         4 . The pattern transfer device according to  claim 3 , wherein, when a maximum voltage of the AC voltage is represented by Vmax, the Vmax is 1 V or higher and 40 V or lower. 
     
     
         5 . The pattern transfer device according to  claim 4 , wherein, when a minimum voltage of the AC voltage is represented by Vmin, the Vmin is higher than −Vmax and lower than 0 V. 
     
     
         6 . The pattern transfer device according to  claim 3 , wherein the AC voltage has a frequency of 0.1 Hz or higher and 100 Hz or lower. 
     
     
         7 . The pattern transfer device according to  claim 1 , wherein the controller keeps the humidity between the substrate and the transfer unit at 30% or more and 80% or less. 
     
     
         8 . The pattern transfer device according to  claim 1 , wherein the controller is disposed at a lower side of the substrate or at an upper side of the transfer unit. 
     
     
         9 . The pattern transfer device according to  claim 1  further comprising:
 a control chamber that contains the substrate, the transfer unit, and the controller, wherein 
 the control chamber controls a humidity or a temperature inside the control chamber. 
 
     
     
         10 . A pattern transfer device comprising:
 a substrate;   a transfer unit having electrodes, the transfer unit being configured to transfer a pattern of the electrodes; and   a control chamber containing the substrate and the transfer unit, the control chamber being configured to control humidity, wherein   the pattern of the electrodes is transferred onto the substrate with a voltage applied between the substrate and the electrodes.   
     
     
         11 . A pattern transfer method employed in a pattern transfer device including a substrate, a transfer unit having electrodes, the transfer unit being configured to transfer a pattern of the electrodes, and a controller configured to control humidity between the substrate and the transfer unit, the pattern transfer method comprising:
 bringing the electrodes of the transfer unit into contact with the substrate;   controlling the humidity between the substrate and the transfer unit by the controller; and   transferring the pattern of the electrodes onto the substrate by applying a voltage between the substrate and the electrodes.   
     
     
         12 . The pattern transfer method according to  claim 11 , wherein
 the voltage is an AC voltage, and   when a maximum voltage of the AC voltage is represented by Vmax, the Vmax is 1 V or higher and 40 V or lower.   
     
     
         13 . The pattern transfer method according to  claim 12 , wherein
 the voltage is an AC voltage, and   when a minimum voltage of the AC voltage is represented by Vmin, the Vmin is higher than −Vmax and lower than 0 V.   
     
     
         14 . The pattern transfer method according to  claim 11 , wherein the controlling includes keeping the humidity between the substrate and the transfer unit at 30% or more and 80% or less by the controller.