Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus

Abstract

A sensor device includes a charge output element including a plurality of piezoelectric bodies and an internal electrode formed between the piezoelectric bodies, a package that houses the charge output element, first conductive paste electrically connected to a plurality of the internal electrodes, and second conductive paste that electrically connects the first conductive paste and an output terminal and has a modulus of elasticity lower than a modulus of elasticity of the first conductive paste. A Young's modulus of the first conductive paste is equal to or higher than 3.4 GPa and equal to or lower than 5.0 GPa and a Young's modulus of the second conductive paste is equal to or higher than 0.1 GPa and equal to or lower than 0.2 GPa.

What is claimed is: 
     
         1 . A sensor device comprising:
 a sensor element configured to output electric charge according to external force, including a first sensor and a second sensor,
 the first sensor including a piezoelectric body and an internal electrode formed on the piezoelectric body included in the first sensor, and 
 the second sensor including a piezoelectric body and an internal electrode formed on the piezoelectric body included in the second sensor; 
   a package including an output terminal and configured to house the sensor element;   a first conductive member electrically connected to either the internal electrode included in the first sensor or the internal electrode included in the second sensor; and   a second conductive member configured to electrically connect the first conductive member and the output terminal and having a modulus of elasticity lower than a modulus of elasticity of the first conductive member.   
     
     
         2 . The sensor device according to  claim 1 , wherein a Young's modulus of the first conductive member is equal to or higher than 3.4 GPa and equal to or lower than 5.0 GPa and a Young's modulus of the second conductive member is equal to or higher than 0.1 GPa and equal to or lower than 0.2 GPa. 
     
     
         3 . The sensor device according to  claim 1 , wherein
 the first conductive member and the second conductive member are formed of paste like materials including fillers having electric conductivity, and   a content percentage of the filler of the first conductive member is larger than a content percentage of the filler of the second conductive member.   
     
     
         4 . The sensor device according to  claim 1 , wherein the internal electrode included in the first sensor is formed in a film shape and the thickness of the internal electrode is equal to or larger than 20 nm and equal to or smaller than 100 nm. 
     
     
         5 . The sensor device according to  claim 1 , wherein
 the package includes a recess in which the piezoelectric element is housed and the depth of which changes stepwise, the recess including a step section in which the output terminal is provided, and   the second conductive material is connected to the step section.   
     
     
         6 . A force detecting device comprising:
 a first base section;   a second base section;   the sensor device according to  claim 1  provided between the first base section and the second base section; and   an external-force detection circuit configured to detect, on the basis of a voltage output from the sensor device, the external force applied to the sensor device.   
     
     
         7 . A force detecting device comprising:
 a first base section;   a second base section;   the sensor device according to  claim 2  provided between the first base section and the second base section; and   an external-force detection circuit configured to detect, on the basis of a voltage output from the sensor device, the external force applied to the sensor device.   
     
     
         8 . A force detecting device comprising:
 a first base section;   a second base section;   the sensor device according to  claim 3  provided between the first base section and the second base section; and   an external-force detection circuit configured to detect, on the basis of a voltage output from the sensor device, the external force applied to the sensor device.   
     
     
         9 . A force detecting device comprising:
 a first base section;   a second base section;   the sensor device according to  claim 4  provided between the first base section and the second base section; and   an external-force detection circuit configured to detect, on the basis of a voltage output from the sensor device, the external force applied to the sensor device.   
     
     
         10 . A force detecting device comprising:
 a first base section;   a second base section;   the sensor device according to  claim 5  provided between the first base section and the second base section; and   an external-force detection circuit configured to detect, on the basis of a voltage output from the sensor device, the external force applied to the sensor device.   
     
     
         11 . A robot comprising:
 an arm; and   the force detecting device according to  claim 6  provided to the arm.   
     
     
         12 . A robot comprising:
 an arm; and   the force detecting device according to  claim 7  provided to the arm.   
     
     
         13 . A robot comprising:
 an arm; and   the force detecting device according to  claim 8  provided to the arm.   
     
     
         14 . A robot comprising:
 an arm; and   the force detecting device according to  claim 9  provided to the arm.   
     
     
         15 . A robot comprising:
 an arm; and   the force detecting device according to  claim 10  provided to the arm.