Sensor device, sensor module, force detection device, and robot

Abstract

A package having a recessed section, a sensor element arranged in the recessed section and having a piezoelectric material, a lid joined to the package and sealing the recessed section of the package are provided. The package has a first hollow portion which a part of the sensor element fits with, on an inner bottom surface of the recessed section. The lid has a second hollow portion which a part of the sensor element fits with.

What is claimed is: 
     
         1 . A force detection device comprising:
 a first plate;   a second plate;   a sensor device between the first plate and the second plate;   wherein the sensor device includes
 a first member having a recessed section, 
 a sensor element having piezoelectric material and arranged in the recessed section, 
 wherein the sensor element has
 a first contact surface which the first member contacts, 
 a second contact surface which the second member contacts, and 
 
 a first hollow portion in which the first contact surface fits is formed on an inner bottom surface of the recessed section. 
   
     
     
         2 . The force detection device according to  claim 1 , wherein a second hollow portion in which the second contact surface fits is formed on the second member. 
     
     
         3 . The force detection device according to  claim 1 , wherein if a normal direction of first contact surface of the sensor element is a Z-axis direction and directions orthogonal to the Z-axis direction and orthogonal to each other are X-axis direction and Y-axis direction,
 the sensor element has:   at least one of a first sensor element which detects a force in the X-axis direction, a second sensor element which detects a force in the Y-axis direction, and a third sensor element which detects a force in the Z-axis direction.   
     
     
         4 . The force detection device according to  claim 1 , comprising an electronic circuit which electrically connects to the sensor element. 
     
     
         5 . The force detection device according to  claim 1 , wherein the sensor device is pressurized by the first plate and the second plate. 
     
     
         6 . The force detection device according to  claim 1 , wherein the first member includes ceramics. 
     
     
         7 . The force detection device according to  claim 1 , wherein the second member includes Kovar. 
     
     
         8 . The force detection device according to  claim 1 , comprising a plurality of the sensor devices, wherein the sensor devices are located at equal angular intervals along a periphery of the first plate or the second plate. 
     
     
         9 . The force detection device according to  claim 1 , wherein the piezoelectric material is quartz. 
     
     
         10 . The force detection device according to  claim 2 , wherein the piezoelectric material is quartz. 
     
     
         11 . The force detection device according to  claim 3 , wherein the piezoelectric material is quartz. 
     
     
         12 . The force detection device according to  claim 4 , wherein the piezoelectric material is quartz. 
     
     
         13 . The force detection device according to  claim 5 , wherein the piezoelectric material is quartz. 
     
     
         14 . The force detection device according to  claim 6 , wherein the piezoelectric material is quartz. 
     
     
         15 . The force detection device according to  claim 7 , wherein the piezoelectric material is quartz. 
     
     
         16 . The force detection device according to  claim 8 , wherein the piezoelectric material is quartz. 
     
     
         17 . The force detection device according to  claim 2 , comprising a plurality of the sensor devices, wherein the sensor devices are located at equal angular intervals along a periphery of the first plate or the second plate. 
     
     
         18 . The force detection device according to  claim 3 , comprising a plurality of the sensor devices, wherein the sensor devices are located at equal angular intervals along a periphery of the first plate or the second plate. 
     
     
         19 . The force detection device according to  claim 4 , comprising a plurality of the sensor devices, wherein the sensor devices are located at equal angular intervals along a periphery of the first plate or the second plate. 
     
     
         20 . The force detection device according to  claim 5 , comprising a plurality of the sensor devices, wherein the sensor devices are located at equal angular intervals along a periphery of the first plate or the second plate.