Device for Precision Displacement

Abstract

A device for performing a precision movement comprising a plate composed of piezoelectric material and comprising electrodes which are provided at mutually opposite and preferably parallel planes, are connectable to a controlled voltage source having electrical voltage and in this case bring about a change in the form and/or mass of the plate is characterized in that at least one of the electrodes is designed in an elastic fashion to form a base module.

What is claimed is: 
     
         1 . A device for performing a precision movement, comprising:
 a plate made of a piezoelectric material;   electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate; and   a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode,   a device bottom;   a first console extending at right angles to the device bottom; and   a T-shaped second console having a crossbeam portion with the top layer thereon and a web portion adjacent to the crossbeam portion at right angles thereto,   wherein
 at least one of the electrodes is a portion of an elastic base module, 
 the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, 
 an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes, and 
 the base module is arranged between the web portion of the second console and the first console in a manner that permits the second console to be displaced relative to the first console in response to application of voltage to the based module. 
   
     
     
         2 . The device according to  claim 1 , wherein
 the first console is formed in a U-shape with at least one leg of the first console extending at right angles to the device bottom on a side of the second console web portion opposite the base module, and   a further base module having a same orientation of crystal axes as the base module is arranged between the at least one leg of the first console on the opposite side of the web portion of the second console and the web portion of the second console such that the plates of the base modules move all in the same direction when voltage is applied.   
     
     
         3 . A device for performing a precision movement, comprising:
 a plate made of a piezoelectric material;   electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate; and   a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode,   a device bottom;   an L-shaped first console extending at right angles to the device bottom and having at least one first portion extending parallel to the device bottom;   a U-shaped second console having two parallel U-shaped legs interconnected by a U-shaped web portion arranged at right angles to the device bottom, wherein   wherein
 at least one of the electrodes is a portion of an elastic base module, 
 the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, 
 an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes, 
 a first leg of the two U-shaped legs closest to the device bottom extends parallel to the first portion of the first console between the device bottom and the first portion, 
 a second leg of the two U-shaped legs the second U-shaped leg extends parallel to the first portion of the first console on a side of the first portion facing away from the device bottom, 
 the base module is arranged between the first leg of the second console and the first portion of the first console that is parallel to the device base, and 
 a further base module having the same orientation of crystal axes as the base module is arranged between a side of the second leg of the two U-shaped legs facing away from the device bottom and the top layer such that a movement of the plates parallel to the first portion of the first console and the two U-shaped legs occurs in a same direction at right angles thereto when voltage is applied. 
   
     
     
         4 . A device for performing a precision movement, comprising:
 a plate made of a piezoelectric material;   electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate; and   a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode,   a device bottom;   a first console extending at right angles to the device bottom; and   a T-shaped second console having a crossbeam portion with the top layer thereon and a web portion adjacent to the crossbeam portion at right angles thereto,   wherein
 at least one of the electrodes is a portion of an elastic base module, 
 the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, 
 an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes, 
 an intermediate layer is arranged between the top layer and a top side of a topmost layer of the base module electrodes facing the top layer, 
 temperature coefficients of expansion of the device bottom and the intermediate layer correspond to one another, and 
 a plurality of base modules having the same orientation of crystal axes are arranged between the device bottom and the intermediate layer at an intermediate distance between each of the plurality of base modules in a direction parallel to the device bottom. 
   
     
     
         5 . The device according to  claim 4 , wherein a mark is attached to top layer. 
     
     
         6 . The device according to  claim 4 , wherein at least one gap is formed between at least one intermediate space between pairs of the plurality of base modules through the intermediate layer and the top layer.