Imprint method, imprint apparatus, and template

Abstract

According to one embodiment, an imprint method is provided. In the imprint method, a template including a mechanoluminescent material is brought into contact with a resist on a substrate. The posture of the template is adjusted on the basis of the intensity of mechanoluminescence from the template. Light is emitted to the resist to harden the resist. The template is separated from the resist.

What is claimed is: 
     
         1 . An imprint method comprising:
 bringing a template including a mechanoluminescent material into contact with a resist on a substrate;   adjusting the posture of the template on the basis of the intensity of mechanoluminescence from the template;   emitting light to the resist to harden the resist; and   separating the template from the resist.   
     
     
         2 . The imprint method according to  claim 1 , further comprising:
 determining whether the template is abnormal on the basis of the intensity of the mechanoluminescence.   
     
     
         3 . The imprint method according to  claim 2 ,
 wherein the intensity of the mechanoluminescence is compared with a first threshold value,   it is determined whether the template is abnormal on the basis of the comparison result, and   the first threshold value is set according to imprint process conditions.   
     
     
         4 . The imprint method according to  claim 2 ,
 wherein it is determined whether the template is abnormal on the basis of a difference between a distribution of the intensity of mechanoluminescence that is currently measured and a distribution of the intensity of mechanoluminescence that has been measured first.   
     
     
         5 . The imprint method according to  claim 4 ,
 wherein the difference is compared with a second threshold value,   it is determined whether the template is abnormal on the basis of the comparison result, and   the second threshold value is set according to the imprint process conditions.   
     
     
         6 . The imprint method according to  claim 1 ,
 wherein mechanoluminescence from the mechanoluminescent material is visible light, infrared rays, or ultraviolet rays.   
     
     
         7 . The imprint method according to  claim 2 ,
 wherein the template includes a first pattern and a second pattern having a lower strength than the first pattern, and   it is determined whether the template is abnormal on the basis of the intensity of mechanoluminescence from the second pattern.   
     
     
         8 . The imprint method according to  claim 1 ,
 wherein the mechanoluminescent material is a mixture of zinc sulfide and manganese.   
     
     
         9 . The imprint method according to  claim 1 ,
 wherein the mechanoluminescent material is a mixture of strontium aluminate and europium.   
     
     
         10 . An imprint apparatus comprising:
 a light receiver that measures the intensity of mechanoluminescence from a template when the template comes into contact with a resist on a substrate;   a controller that generates an instruction to adjust the posture of the template on the basis of the intensity of the mechanoluminescence; and   a posture control mechanism that adjusts the posture of the template on the basis of the instruction.   
     
     
         11 . The imprint apparatus according to  claim 10 ,
 wherein the controller determines whether the template is abnormal on the basis of the intensity of the mechanoluminescence.   
     
     
         12 . The imprint apparatus according to  claim 11 ,
 wherein the controller compares the intensity of the mechanoluminescence with a first threshold value and determines whether the template is abnormal on the basis of the comparison result, and   the first threshold value is set according to imprint process conditions.   
     
     
         13 . The imprint apparatus according to  claim 11 ,
 wherein the controller determines whether the template is abnormal on the basis of a difference between a distribution of the intensity of mechanoluminescence that is currently measured and a distribution of the intensity of mechanoluminescence that has been measured first.   
     
     
         14 . The imprint apparatus according to  claim 12 ,
 wherein the controller compares the difference with a second threshold value and determines whether the template is abnormal on the basis of the comparison result, and   the second threshold value is set according to the imprint process conditions.   
     
     
         15 . A template comprising:
 a first pattern,   wherein the template includes a mechanoluminescent material.   
     
     
         16 . The template according to  claim 15 ,
 wherein mechanoluminescence from the mechanoluminescent material is visible light, infrared rays, or ultraviolet rays.   
     
     
         17 . The template according to  claim 15 , further comprising:
 a second pattern having a lower strength than the first pattern.   
     
     
         18 . The template according to  claim 15 ,
 wherein the mechanoluminescent material is a mixture of zinc sulfide and manganese.   
     
     
         19 . The template according to  claim 15 ,
 wherein the mechanoluminescent material is a mixture of strontium aluminate and europium.   
     
     
         20 . The template according to  claim 15 ,
 wherein, when the mechanoluminescent material is elastically deformed, displacement is proportional to the mechanoluminescence intensity up to a certain value.