Pump apparatus and particle detector having a pump apparatus

Abstract

A pump apparatus for gaseous media. A film is provided on a substrate and is connected to the substrate in the edge region of the film. By interaction between a magnetic device on the substrate and a magnetic device on the film, the film can be raised or lowered on the substrate. A pumping motion is thereby produced.

What is claimed is: 
     
         1 . A pump apparatus for gaseous media, comprising:
 a substrate;   a film disposed on the substrate, an edge region of the film being connected to the substrate and a volume being enclosed between the substrate and the film;   an opening disposed between an inner space and an outer space of the volume enclosed by the substrate and film;   a first magnetic device coupled to the substrate and designed to furnish a first magnetic field; and   a second magnetic device coupled to the film and designed to furnish a second magnetic field that enters into interaction with the first magnetic field;   wherein at least one of the first magnetic device and the second magnetic device includes an electric coil.   
     
     
         2 . The pump apparatus as recited in  claim 1 , wherein at least one of the first magnetic device and the second magnetic device includes a permanent magnet. 
     
     
         3 . The pump apparatus ( 1 ) as recited in  claim 1 , the first magnetic device ( 30 ) and the second magnetic device ( 40 ) respectively encompassing an electric coil ( 32 ,  42 ). 
     
     
         4 . The pump apparatus as recited in  claim 1 , wherein the opening includes a first valve device. 
     
     
         5 . The pump apparatus as recited in  claim 4 , further comprising:
 a second valve device disposed between the inner space and the outer space of the volume enclosed between the substrate and film.   
     
     
         6 . The pump apparatus as recited in  claim 5 , wherein at least one of the first valve device and the second valve device is disposed at a transition region between the substrate and the film. 
     
     
         7 . The pump apparatus as recited in  claim 5 , wherein at least one of the first valve device and the second valve device includes a further electric coil designed to furnish a magnetic field when an electric current flows through the further coil. 
     
     
         8 . The pump apparatus as recited in  claim 1 , wherein the film is a biaxially oriented polyester film. 
     
     
         9 . The pump apparatus as recited in  claim 1 , wherein the substrate includes polyimide. 
     
     
         10 . A particle detector, comprising:
 a particle sensor; and   a pump apparatus for gaseous media, the pump apparatus including a substrate, a film disposed on the substrate, an edge region of the film being connected to the substrate and a volume being enclosed between the substrate and the film, an opening disposed between an inner space and an outer space of the volume enclosed by the substrate and film, a first magnetic device coupled to the substrate and designed to furnish a first magnetic field, and a second magnetic device coupled to the film and designed to furnish a second magnetic field that enters into interaction with the first magnetic field, wherein at least one of the first magnetic device and the second magnetic device includes an electric coil