Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom

Abstract

A resist composition containing a compound represented by the general formulas (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, an alcoholic compound that can be derived therefrom, and a method for producing an alcoholic compound represented by general formulas (6) or (7) are described.

1 - 13 . (canceled) 
     
     
         14 . A method for producing an alcoholic compound represented by the formula (6): 
       
         
           
           
               
               
           
         
         or formula (7): 
       
       
         
           
           
               
               
           
         
         said method comprising
 reacting a polyphenolic compound represented by formula (3) or formula (4): 
 
       
       
         
           
           
               
               
           
         
         
           with an alkylene oxide introducing agent in the presence of a basic catalyst, 
           wherein in the aforesaid formulas 
           X′ is a hydrogen atom or a monovalent substituent having 1 to 18 carbon atoms; 
           R 0  are each independently an alkyl group having 1 to 4 carbon atoms or a halogen atom and may be the same or different on the same naphthalene ring; 
           R′ are each independently an alkylene group having 1 to 4 carbon atoms; 
           q are each independently an integer of 1 or larger; and 
           p are each independently an integer of 0 to 5. 
         
       
     
     
         15 . An alcoholic compound represented by the formula (6): 
       
         
           
           
               
               
           
         
         or formula (7): 
       
       
         
           
           
               
               
           
         
         wherein
 X′ is a hydrogen atom or a monovalent substituent having 1 to 18 carbon atoms; 
 R 0  are each independently an alkyl group having 1 to 4 carbon atoms or a halogen atom and may be the same or different on the same naphthalene ring; 
 R′ are each independently an alkylene group having 1 to 4 carbon atoms; 
 q are each independently an integer of 1 or larger; and 
 p are each independently an integer of 0 to 5. 
 
       
     
     
         16 . A method for producing an alcoholic compound represented by the formula (60): 
       
         
           
           
               
               
           
         
         or formula (70): 
       
       
         
           
           
               
               
           
         
         
           said method comprising 
           reacting the polyphenolic compound represented by formula (30): 
         
       
       
         
           
           
               
               
           
         
         or a compound represented by formula (40): 
       
       
         
           
           
               
               
           
         
         
           with an alkylene oxide introducing agent in the presence of a basic catalyst, 
         
         wherein in the aforesaid formulas
 X′ are each independently a hydrogen atom or a monovalent substituent having 1 to 18 carbon atoms; 
 R 0  are each independently an alkyl group having 1 to 4 carbon atoms or a halogen atom and may be the same or different on the same naphthalene ring; 
 R′ are each independently an alkylene group having 1 to 4 carbon atoms; 
 q are each independently an integer of 1 or larger; and 
 p are each independently an integer of 0 to 5. 
 
       
     
     
         17 . The alcoholic compound according to  claim 15 , wherein the formula (6) is the formula (60), and the formula (7) is the formula (70): 
       
         
           
           
               
               
           
         
         wherein
 X′ is a hydrogen atom or a monovalent substituent having 1 to 18 carbon atoms; 
 R 0  are each independently an alkyl group having 1 to 4 carbon atoms or a halogen atom and may be the same or different on the same naphthalene ring; 
 R′ are each independently an alkylene group having 1 to 4 carbon atoms; 
 q are each independently an integer of 1 or larger; and 
 p are each independently an integer of 0 to 5.