Trapped membrane

Abstract

A MEMS trapped membrane. The MEMS trapped membrane includes a first layer and a second structure. The first layer has an outer section and an inner membrane. The outer section and inner membrane are detached from each other by a separation, and have inner membrane protrusions and outer section protrusions formed by the separation. The second structure is coupled to the outer section and has second protrusions that overlay corresponding inner membrane protrusions.

What is claimed is: 
     
         1 . A MEMS microphone comprising:
 a first layer having an outer section and an inner membrane, the outer section and the inner membrane detached from each other by a separation, the inner membrane having inner membrane protrusions and the outer section having outer section protrusions;   a second layer having second protrusions that overlay the inner membrane protrusions, and   a plurality of tabs coupled to the inner membrane that overlay the outer section protrusions,   wherein the inner membrane is trapped between the plurality of tabs and the second protrusions.   
     
     
         2 . The MEMS microphone of  claim 1 , wherein the inner membrane protrusions are serpentine shaped. 
     
     
         3 . The MEMS microphone of  claim 1 , wherein the outer section protrusions are serpentine shaped. 
     
     
         4 . The MEMS microphone of  claim 1 , wherein the inner membrane protrusions and the outer section protrusions are formed by the separation. 
     
     
         5 . The MEMS microphone of  claim 1 , wherein the second layer is anchored to the outer section by one or more connectors. 
     
     
         6 . The MEMS microphone of  claim 5 , wherein the one or more connectors act as a seal, sealing a connecting layer between the one or more connectors. 
     
     
         7 . The MEMS microphone of  claim 1 , wherein an outer portion of the second layer is attached to the outer section using MEMS techniques. 
     
     
         8 . The MEMS microphone of  claim 1 , wherein the separation is serpentine shaped. 
     
     
         9 . The MEMS microphone of  claim 1 , wherein the second layer acts as an overtravel stop for the inner membrane in a first direction. 
     
     
         10 . The MEMS microphone of  claim 1 , wherein the second layer is directly attached to the outer section by the one or more connectors. 
     
     
         11 . The MEMS microphone of  claim 1 , further comprising a connecting layer separating the second layer from the outer section. 
     
     
         12 . The MEMS microphone of  claim 1 , wherein the plurality of tabs are anchored to the inner membrane by one or more connectors. 
     
     
         13 . The MEMS microphone of  claim 12 , wherein the one or more connectors act as a seal, sealing a connecting layer between the one or more connectors. 
     
     
         14 . The MEMS microphone of  claim 1 , wherein the plurality of tabs are separate elements attached to the inner membrane using MEMS techniques. 
     
     
         15 . The MEMS microphone of  claim 1 , wherein the plurality of tabs act as overtravel stops for the inner membrane in a second direction.