Electrochemical polishing apparatus

Abstract

An electrochemical polishing apparatus is provided for polishing a workpiece having at least one sharp object. According to the present invention, the electrolyte is driven to flow to the sharp object and the electrochemical processing is performed for polishing the sharp object.

What is claimed is: 
     
         1 . An electrochemical polishing apparatus, polishing a workpiece having at least one sharp object, comprising:
 an electrode, having a plurality of hollow-out parts corresponding to said workpiece, said plurality of hollow-out parts allowing an electrolyte to pass through and flow to said sharp object of said workpiece, said electrolyte flowing from a sharp end of said sharp object to a sharp body of said sharp object for reducing the difference between a first polished amount of said sharp end and a second polished amount of said sharp body; and   a power supply unit, coupled to said electrode and said workpiece.   
     
     
         2 . The electrochemical polishing apparatus of  claim 1 , further comprising an electrolyte driving unit, driving said electrolyte to flow. 
     
     
         3 . The electrochemical polishing apparatus of  claim 2 , further comprising an electrolyte tank, accommodating said electrode, said workpiece, and said electrolyte driving unit, and said electrolyte driving unit being an electrolyte disturbing device disturbing said electrolyte. 
     
     
         4 . The electrochemical polishing apparatus of  claim 2 , wherein said electrolyte driving unit is an electrolyte projecting device projecting said electrolyte to said electrode. 
     
     
         5 . The electrochemical polishing apparatus of  claim 1 , further comprising a flow equalizer, disposed between said electrode and said workpiece, and having at least one hollow-out part corresponding to said at least one sharp object of said workpiece, respectively. 
     
     
         6 . The electrochemical polishing apparatus of  claim 5 , wherein said flow equalizer and said workpiece are spaced by a distance. 
     
     
         7 . The electrochemical polishing apparatus of  claim 1 , wherein said electrode is a metal mesh or a metal plate. 
     
     
         8 . The electrochemical polishing apparatus of  claim 1 , wherein said plurality of hollow-out parts are arranged symmetrically. 
     
     
         9 . The electrochemical polishing apparatus of  claim 1 , wherein said plurality of hollow-out parts are arranged asymmetrically. 
     
     
         10 . The electrochemical polishing apparatus of  claim 1 , wherein said electrode and said workpiece are spaced by a distance. 
     
     
         11 . The electrochemical polishing apparatus of  claim 1 , wherein the material of said electrode is titanium.