Manufacturing method of pressure sensor

Abstract

A manufacturing method of a pressure sensor, in which the pressure sensor includes: a metal joint having an introduction hole configured to flow a measurement target fluid therethrough; and a sensor module metal member including: a cylindrical portion provided to the joint; a diaphragm; and a dent configured to receive the measurement target fluid from the introduction hole, includes: welding the joint to the sensor module metal member; and subsequently, heating the joint and the sensor module metal member.

What is claimed is: 
     
         1 . A manufacturing method of a pressure sensor, the pressure sensor comprising: a metal joint attached to a target member and having an introduction hole configured to flow a measurement target fluid therethrough; and a sensor module metal member comprising:
 a cylindrical portion provided to the joint; a diaphragm integrated with an end of the cylindrical portion; and a dent configured to receive the measurement target fluid from the introduction hole, the manufacturing method comprising:
 welding the joint to the sensor module metal member; and 
 subsequently, heating the joint and the sensor module metal member. 
   
     
     
         2 . The manufacturing method of a pressure sensor according to  claim 1 , further comprising:
 attaching a detector comprising a strain gauge to the diaphragm of the sensor module metal member, after the heating of the joint and the sensor module metal member.   
     
     
         3 . The manufacturing method of a pressure sensor according to  claim 1 , wherein
 the heating after the welding of the joint and the sensor module metal member is a precipitation hardening treatment comprising heating and leaving the joint and the sensor module metal member to stand until cool for precipitation hardening.   
     
     
         4 . The manufacturing method of a pressure sensor according to  claim 1 , wherein
 the heating comprises: a re-solid solution treatment; and, after the re-solid solution treatment, a precipitation hardening treatment comprising heating and leaving to stand until cool for precipitation hardening.