Tooling for vapor deposition

Abstract

An embodiment of an apparatus includes a first crucible in communication with a deposition chamber, an energy source, and a workpiece fixture. The first crucible includes a plurality of walls defining an upper recess and a first lower recess, at least the upper recess open to an interior of the deposition chamber. The energy source is configured to selectively apply and direct energy within the deposition chamber, including toward the first crucible. The workpiece fixture includes tooling and a plurality of workpiece holders configured to retain at least one workpiece selectively within the deposition chamber. The tooling includes at least one wall separating at least a first of the plurality of workpiece holders from a second of the plurality of workpiece holders.

1 . An apparatus comprising:
 a deposition chamber;   a first crucible including a plurality of walls defining an upper recess and a first lower recess, at least the upper recess open to an interior of the deposition chamber;   an energy source configured to selectively apply and direct energy within the deposition chamber, including toward the first crucible; and   a workpiece fixture comprising:
 a plurality of workpiece holders configured to retain at least one workpiece selectively within the deposition chamber; and 
 tooling including at least one wall separating at least a first of the plurality of workpiece holders from a second of the plurality of workpiece holders. 
   
     
     
         2 . The apparatus of  claim 1 , wherein the plurality of workpiece holders comprises:
 a first workpiece holder configured to retain a first workpiece in a first coating zone in the deposition chamber; and   a second workpiece holder configured to retain a second workpiece in a second coating zone in the deposition chamber;   wherein the at least one wall separates the first workpiece holder and the second workpiece holder.   
     
     
         3 . The apparatus of  claim 2 , further comprising a second crucible;
 wherein the first crucible is in communication with the first coating zone, and the second crucible is in communication with the second coating zone.   
     
     
         4 . The apparatus of  claim 1 , wherein the workpiece fixture further comprises:
 a first arm configured to manipulate at least one of the plurality of workpiece holders about a first longitudinal axis.   
     
     
         5 . The apparatus of  claim 4 , wherein the workpiece fixture further comprises:
 a triaxial shaft supporting the plurality of workpiece holders, the triaxial shaft including at least the first arm.   
     
     
         6 . The apparatus of  claim 5 , wherein ones of the plurality of workpiece holders are secured to a plurality of rakes connected to the triaxial shaft, and the triaxial shaft is configured to drive rotation of the rakes, and in turn, rotation of the plurality of workpiece holders about at least the first longitudinal axis. 
     
     
         7 . The apparatus of  claim 6 , wherein the triaxial shaft is configured to drive rotation of the rakes about at least the first longitudinal axis so as to expose different portions of each of the plurality of workpieces to a plurality of vapor plumes generated from energy directed to coating feedstock disposed in the deposition chamber. 
     
     
         8 . The apparatus of  claim 1 , and further comprising:
 a magazine positionable within deposition chamber, wherein the magazine retains a plurality of crucibles including the first crucible.   
     
     
         9 . The apparatus of  claim 8 , wherein the magazine is positioned in the deposition chamber such that at least the upper recess of the first crucible is in line with the first workpiece holder. 
     
     
         10 . The apparatus of  claim 1 , wherein the at least one wall includes a plurality of baffle walls defining at least a portion of a first coating subchamber and a second coating subchamber. 
     
     
         11 . The apparatus of  claim 1 , wherein the at least one wall includes a wall with a first thermally reflective surface facing the first workpiece holder, and a second thermally reflective surface facing the second workpiece holder. 
     
     
         12 . The apparatus of  claim 11 , wherein the first thermally reflective surface is spaced apart from the second thermally reflective surface, defining a thermal buffer space therebetween. 
     
     
         13 . A workpiece fixture for a vapor deposition apparatus comprises:
 a plurality of workpiece holders configured to retain at least one workpiece selectively within a vapor deposition chamber; and   tooling including at least one wall separating at least a first of the plurality of workpiece holders from a second of the plurality of workpiece holders.   
     
     
         14 . The workpiece fixture of  claim 13 , wherein the plurality of workpiece holders comprises:
 a first workpiece holder configured to retain a first workpiece in a first coating zone in the deposition chamber; and   a second workpiece holder configured to retain a second workpiece in a second coating zone in the deposition chamber;   wherein the at least one wall separates the first workpiece holder and the second workpiece holder.   
     
     
         15 . The workpiece fixture of  claim 13 , and further comprising:
 a first arm configured to manipulate at least one of the plurality of workpiece holders about a first longitudinal axis.   
     
     
         16 . The workpiece fixture of  claim 15 , and further comprising:
 a triaxial shaft supporting a plurality of workpiece holders, the triaxial shaft including at least the first arm.   
     
     
         17 . The workpiece fixture of  claim 16 , wherein ones of the plurality of workpiece holders are secured to a plurality of rakes connected to the triaxial shaft, and the triaxial shaft is configured to drive rotation of the rakes, and in turn, rotation of the plurality of workpiece holders about at least the first longitudinal axis. 
     
     
         18 . The workpiece fixture of  claim 13 , wherein the at least one wall includes a plurality of baffle walls defining at least a portion of a first coating subchamber and at least a portion of a second coating subchamber. 
     
     
         19 . The workpiece fixture of  claim 13 , wherein the at least one wall includes a wall with a first thermally reflective surface facing the first workpiece holder, and a second thermally reflective surface facing the second workpiece holder. 
     
     
         20 . The workpiece fixture of  claim 19 , wherein the first thermally reflective surface is spaced apart from the second thermally reflective surface, defining a thermal buffer space therebetween.